Physics of laser-driven tin plasma sources of EUV radiation for nanolithography von Versolato, Oscar O

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Prominent radiative contributions from multiply-excited states in laser-produced tin plasma for nanolithography von Torretti, F., Sheil, J., Schupp, R., Basko, M. M., Bayraktar, M., Meijer, R. A., Witte, S., Ubachs, W., Hoekstra, R., Versolato, O. O., Neukirch, A. J., Colgan, J.

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Microdroplet-tin plasma sources of EUV radiation driven by solid-state-lasers (Topical Review) von Versolato, O O, Sheil, J, Witte, S, Ubachs, W, Hoekstra, R

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Efficient rotational cooling of Coulomb-crystallized molecular ions by a helium buffer gas von Hansen, A. K., Versolato, O. O., Kłosowski, Ł., Kristensen, S. B., Gingell, A., Schwarz, M., Windberger, A., Ullrich, J., López-Urrutia, J. R. Crespo, Drewsen, M.

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Coulomb crystallization of highly charged ions von Schmöger, L., Versolato, O. O., Schwarz, M., Kohnen, M., Windberger, A., Piest, B., Feuchtenbeiner, S., Pedregosa-Gutierrez, J., Leopold, T., Micke, P., Hansen, A. K., Baumann, T. M., Drewsen, M., Ullrich, J., Schmidt, P. O., López-Urrutia, J. R. Crespo

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Radiation transport and scaling of optical depth in Nd:YAG laser-produced microdroplet-tin plasma von Schupp, R., Torretti, F., Meijer, R. A., Bayraktar, M., Sheil, J., Scheers, J., Kurilovich, D., Bayerle, A., Schafgans, A. A., Purvis, M., Eikema, K. S. E., Witte, S., Ubachs, W., Hoekstra, R., Versolato, O. O.

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Short-wavelength out-of-band EUV emission from Sn laser-produced plasma von Torretti, F, Schupp, R, Kurilovich, D, Bayerle, A, Scheers, J, Ubachs, W, Hoekstra, R, Versolato, O O

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Multiply-excited states and their contribution to opacity in CO2 laser-driven tin-plasma conditions von Sheil, J, Versolato, O O, Neukirch, A J, Colgan, J

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High-energy ions from Nd:YAG laser ablation of tin microdroplets: comparison between experiment and a single-fluid hydrodynamic model von Hemminga, D J, Poirier, L, Basko, M M, Hoekstra, R, Ubachs, W, Versolato, O O, Sheil, J

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Extreme ultraviolet light from a tin plasma driven by a 2-µm-wavelength laser von Behnke, L, Schupp, R, Bouza, Z, Bayraktar, M, Mazzotta, Z, Meijer, R, Sheil, J, Witte, S, Ubachs, W, Hoekstra, R, Versolato, O O

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Cryogenic linear Paul trap for cold highly charged ion experiments von Schwarz, M, Versolato, O O, Windberger, A, Brunner, F R, Ballance, T, Eberle, S N, Ullrich, J, Schmidt, P O, Hansen, A K, Gingell, A D, Drewsen, M, López-Urrutia, J R Crespo

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Spectral characterization of an industrial EUV light source for nanolithography von Torretti, F, Liu, F, Bayraktar, M, Scheers, J, Bouza, Z, Ubachs, W, Hoekstra, R, Versolato, O

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Power-Law Scaling Relating the Average Charge State and Kinetic Energy in Expanding Laser-Driven Plasmas von Sheil, J, Poirier, L, Lassise, A C, Hemminga, D J, Schouwenaars, S, Braaksma, N, Frenzel, A, Hoekstra, R, Versolato, O O

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Energy- and charge-state-resolved spectrometry of tin laser-produced plasma using a retarding field energy analyzer von Poirier, L., Lassise, A., Mostafa, Y., Behnke, L., Braaksma, N., Assink, L., Hoekstra, R., Versolato, O. O.

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Laser-impact-induced splashing: an analysis of the splash crown evolution after Nd:YAG ns-pulse laser impact on a liquid tin pool von Hermens, J., Gelderblom, H., Liu, B., Duffhues, J., Rindt, P., Versolato, O. O.

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Nanosecond laser ablation threshold of liquid tin microdroplets von Meijer, R. A., Kurilovich, D., Liu, B., Mazzotta, Z., Hernandez-Rueda, J., Versolato, O. O., Witte, S.

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Cross-calibration of a combined electrostatic and time-of-flight analyzer for energy- and charge-state-resolved spectrometry of tin laser-produced plasma von Poirier, L., Bayerle, A., Lassise, A., Torretti, F., Schupp, R., Behnke, L., Mostafa, Y., Ubachs, W., Versolato, O. O., Hoekstra, R.

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Evidence of production of keV Sn + ions in the H 2 buffer gas surrounding an Sn-plasma EUV source von Rai, S, Bijlsma, K I, Poirier, L, de Wit, E, Assink, L, Lassise, A, Rabadán, I, Méndez, L, Sheil, J, Versolato, O O, Hoekstra, R

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Evidence of production of keV Sn+ ions in the H2 buffer gas surrounding an Sn-plasma EUV source von Rai, S, Bijlsma, K I, Poirier, L, de Wit, E, Assink, L, Lassise, A, Rabadán, I, Méndez, L, Sheil, J, Versolato, O O, Hoekstra, R

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The spectrum of a 1-μm-wavelength-driven tin microdroplet laser-produced plasma source in the 5.5–265.5 nm wavelength range von Bouza, Z., Byers, J., Scheers, J., Schupp, R., Mostafa, Y., Behnke, L., Mazzotta, Z., Sheil, J., Ubachs, W., Hoekstra, R., Bayraktar, M., Versolato, O. O.

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