High-Frequency Acoustic for Nanostructure Wetting Characterization von Li, Sizhe, Lamant, Sebastien, Carlier, Julien, Toubal, Malika, Campistron, Pierre, Xu, Xiumei, Vereecke, Guy, Senez, Vincent, Thomy, Vincent, Nongaillard, Bertrand

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Cleaning of High Aspect Ratio STI Structures for Advanced Logic Devices by Implementation of a Surface Modification Drying Technique von Amemiya, Fumihiro, Holsteyns, Frank, Sebaai, Farid, Baudot, Sylvain, Komori, Kana, Vereecke, Guy, Xu, Xiu Mei

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Ice-VII-like Structure Observed By XRD in Water Confined in Silica Nanoholes von Vereecke, Guy, Kenis, Karine, Wostyn, Kurt, Sanchez, Efrain Altamirano

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Using water structuring by ions to address pattern loading in wet HF-based oxide recess etch von Vereecke, Guy, De Coster, Hanne, Dochain, Denis, Nurekeyeva, Kunsulu, Conlan, Shona, Nsimba, Anthony, Wostyn, Kurt, Sanchez, Efrain Altamirano

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Superhydrophobic Breakdown of Nanostructured Surfaces Characterized in Situ Using ATR–FTIR von Vrancken, Nandi, Sergeant, Stefanie, Vereecke, Guy, Doumen, Geert, Holsteyns, Frank, Terryn, Herman, De Gendt, Stefan, Xu, XiuMei

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In-situ ATR-FTIR for dynamic analysis of superhydrophobic breakdown on nanostructured silicon surfaces von Vrancken, Nandi, Li, Jiaqi, Sergeant, Stefanie, Vereecke, Guy, Doumen, Geert, Holsteyns, Frank, Chen, Chang, Terryn, Herman, De Gendt, Stefan, Xu, XiuMei

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Conversion of a Patterned Organic Resist into a High Performance Inorganic Hard Mask for High Resolution Pattern Transfer von Marneffe, Jean-François de, Chan, Boon Teik, Spieser, Martin, Vereecke, Guy, Naumov, Sergej, Vanhaeren, Danielle, Wolf, Heiko, Knoll, Armin W.

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Effect of pH and Ion Concentration on Wetting of Nanoholes and Water Structuring von Cho, Hwiwon, Vereecke, Guy, Kenis, Karine, Kim, Tae-Gon, Park, Jin-Goo, Wostyn, Kurt, Sanchez, Efrain Altamirano

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Investigation of Selective Wet Etching of SiGe Substrates for High-Performance Device Manufacturing von Wostyn, Kurt, Puttarame Gowda, Pallavi, Kim, Dong Gyu, Park, Jin Goo, Vereecke, Guy, Kim, Tae Gon, Altamirano-Sanchez, Efrain

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Integration and Dielectric Reliability of 30 nm Half Pitch Structures in Aurora ® LK HM von Demuynck, Steven, Huffman, Craig, Claes, Martine, Suhard, Samuel, Versluijs, Janko, Volders, Henny, Heylen, Nancy, Kellens, Kristof, Croes, Kristof, Struyf, Herbert, Vereecke, Guy, Verdonck, Patrick, Roest, David De, Beynet, Julien, Sprey, Hessel, Beyer, Gerald P.

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Capturing Wetting States in Nanopatterned Silicon von Xu, XiuMei, Vereecke, Guy, Chen, Chang, Pourtois, Geoffrey, Armini, Silvia, Verellen, Niels, Tsai, Wei-Kang, Kim, Dong-Wook, Lee, Eunsongyi, Lin, Chang-You, Van Dorpe, Pol, Struyf, Herbert, Holsteyns, Frank, Moshchalkov, Victor, Indekeu, Joseph, De Gendt, Stefan

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Calculation of the solubility diagrams in the system Ca(OH)2-H3PO4-KOH-HNO3-CO2-H2O von VEREECKE, G, LEMAITRE, J

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Dielectric Reliability of 50 nm Half Pitch Structures in Aurora ® LK von Demuynck, Steven, Kim, Honggun, Huffman, Craig, Darnon, Maxime, Struyf, Herbert, Versluijs, Janko, Claes, Martine, Vereecke, Guy, Verdonck, Patrick, Volders, Henny, Heylen, Nancy, Kellens, Kristof, Roest, David De, Sprey, Hessel, Beyer, Gerald

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Superhydrophobic Breakdown of Nanostructured Surfaces Characterized in Situ Using ATR-FTIR von Vrancken, Nandi, Sergeant, Stefanie, Vereecke, Guy, Doumen, Geert, Holsteyns, Frank, Terryn, Herman, De Gendt, Stefan, Xu, XiuMei

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Characterization of Wetting of Deep Silica Nanoholes by Aqueous Solutions Using ATR-FTIR von Holsteyns, Frank, Iino, Hideaki, Vereecke, Guy, Altamirano-Sanchez, Efrain, Darcos, Audrey

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In-situ ATR-FTIR for dynamic analysis of superhydrophobic breakdown on nanostructured silicon surfaces von Vrancken, Nandi, Li, Jiaqi, Sergeant, Stefanie, Vereecke, Guy, Doumen, Geert, Holsteyns, Frank, Chen, Chang, Terryn, Herman, De Gendt, Stefan, Xu, XiuMei

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Effect of 1-D Nano-Confinement on the Kinetics of a Click-Chemistry Surface Reaction Used in Biosensors von Holsteyns, Frank, Vos, Rita, Dutta, Abhishek, Vereecke, Guy, de Keyser, Quinten, Debruyn, Haroen

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Wet etching of TiN in 1-D and 2-D confined nano-spaces of FinFET transistors von Vereecke, Guy, De Coster, Hanne, Van Alphen, Senne, Carolan, Patrick, Bender, Hugo, Willems, Kherim, Ragnarsson, Lars-Åke, Van Dorpe, Pol, Horiguchi, Naoto, Holsteyns, Frank

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Hydrogen outgassing induced liner/barrier reliability degradation in through silicon via's von Oba, Yoshiyuki, Wu, Chen, Van Huylenbroeck, Stefaan, Van Besien, Els, Vereecke, Guy, Stucchi, Michele, De Wolf, Ingrid, Beyer, Gerald, Beyne, Eric, Croes, Kristof

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Relation between Particle Density and Haze on a Wafer: a New Approach to Measuring Nano-Sized Particles von Lux, Marcel, Vinckier, Chris, Vos, Rita, Vereecke, Guy, Kenis, Karine, Holsteyns, Frank, Xu, Kai Dong, Fyen, Wim, Heyns, Marc, Mertens, Paul W.

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