A novel multisite silicon probe for high quality laminar neural recordings von Grand, László, Pongrácz, Anita, Vázsonyi, Éva, Márton, Gergely, Gubán, Dorottya, Fiáth, Richárd, Kerekes, Bálint Péter, Karmos, György, Ulbert, István, Battistig, Gábor

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Nanocrystal characterization by ellipsometry in porous silicon using model dielectric function von Petrik, Peter, Fried, Miklos, Vazsonyi, Eva, Basa, Peter, Lohner, Tivadar, Kozma, Peter, Makkai, Zsolt

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Effects of the elastic cover on tactile sensor arrays von Vasarhelyi, Gabor, Adam, Maria, Vazsonyi, Eva, Barsony, Istvan, Ducso, Csaba

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A novel multisite silicon probe for laminar neural recordings von Fiáth, Richárd, Grand, László, Kerekes, Bálint, Pongrácz, Anita, Vázsonyi, Éva, Márton, Gergely, Battistig, Gábor, Ulbert, István

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METHOD FOR FABRICATING THIN FILM SEMICONDUCTOR DEVICES von HORZEL, JOERG, VAZSONYI, EVA

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Method for fabricating thin film semiconductor devices von HORZEL, JOERG, VAZSONYI, EVA

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CMOS integrated process for fabricating monocrystalline silicon micromechanical elements by porous silicon micromachining von Ádám, Antalné, Barsony, István, Ducso, Csaba, Eros, Magdolna, Mohacsy, Tibor, Payer, Károlyné, Vazsonyi, Eva

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CMOS integrated process for fabricating monocrystalline silicon micromechanical elements by porous silicon micromachining von VAZSONYI EVA, ADAM ANTALNE, EROS MAGDOLNA, DUCSO CSABA, PAYER KAROLYNE, MOHACSY TIBOR, BARSONY ISTVAN

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MONOLITHICALLY INTEGRATED MONOCRYSTALLINE MICROMECHANICAL ELEMENTS von DUECSOE, CSABA, EROES, MAGDOLNA, ADAM, ANTALNE, MOHACSY, TIBOR, VAZSONYI, EVA, BARSONY, ISTVAN, PAYER, KAROLYNE

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METHOD FOR PRODUCING MICROMECHANICAL ELEMENTS CAN BE INTEGRATED INTO CMOS TECHNOLOGY, CARRYING MONOLITH SI AND MONOLITH SIO PRODUCED BY POROUS SI MICROMANUFACTURING PROCESS von VAZSONYI EVA, ADAM ANTALNE, DUECSOE CSABA, PAYER KAROLYNE, MOHACSY TIBOR, BARSONY ISTVAN, EROES MAGDOLNA

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CMOS INTEGRATED PROCESS FOR FABRICATING MONOCRYSTALLINE SILICON MICROMECHANICAL ELEMENTS BY POROUS SILICON MICROMACHINING AND SENSOR CHIP COMPRISING SUCH ELEMENT von DUECSOE, CSABA, EROES, MAGDOLNA, ADAM, ANTALNE, MOHACSY, TIBOR, VAZSONYI, EVA, BARSONY, ISTVAN, PAYER, KAROLYNE

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CMOS INTEGRATED PROCESS FOR FABRICATING MONOCRYSTALLINE SILICON von DUECSOE, CSABA, EROES, MAGDOLNA, ADAM, ANTALNE, MOHACSY, TIBOR, VAZSONYI, EVA, BARSONY, ISTVAN, PAYER, KAROLYNE

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Experimental proof for nanoparticle origin of photoluminescence in porous silicon layers von Koós, Margit, Pócsik, István, Vázsonyi, Éva B.

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