Plasma-chemical deposition of diamond-like coatings in capacitively coupled RF plasma in toluene von Zadiriev, I I, Nikonov, A M, Kralkina, E A, Vavilin, K V

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Axial Dependence of the Longitudinal RF Magnetic Field and Plasma Parameters in an Inductive Plasma Source with an External Magnetic Field von Nikonov, A. M., Vavilin, K. V., Zadiriev, I. I., Kralkina, E. A.

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Frequency Dependence of Parameters of an Inductive RF Discharge Placed in a Weak Magnetic Field von Nikonov, A. M., Vavilin, K. V., Zadiriev, I. I., Dvinin, S. A., Kral’kina, E. A.

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Pulsed Inductive RF Discharge as an Effective Working Process of an RF Ion Source von Zadiriev, I. I., Kralkina, E. A., Vavilin, K. V., Nikonov, A. M., Shvidkiy, G. V.

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Characteristics of Capacitive RF Discharge in a Magnetic Field with a Predominant Radial Component von Shvydkiy, G. V., Zadiriev, I. I., Vavilin, K. V., Kralkina, E. A., Nikonov, A. M.

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Physical Properties of a Low-Power Helicon Source Operating on a High-Frequency Discharge with a Capacitive Component von Zadiriev, I. I., Vavilin, K. V., Kral’kina, E. A., Nikonov, A. M., Shvydkii, G. V.

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Influence of an External Circuit on the Plasma Parameters in the Channel of the Radio-Frequency Accelerator with a Closed Electron Drift von Shvydky, G. V., Zadiriev, I. I., Kralkina, E. A., Vavilin, K. V.

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Physical Features of the Particle Flow Created by a Low-Power Helicon Plasma Source von Zadiriev, I. I., Vavilin, K. V., Kralkina, E. A., Nikonov, A. M., Shvydky, G. V.

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Dependence of Parameters of a Radio-Frequency Closed Electron Drift Accelerator on the Radio-Frequency Capacitive Discharge Circuit von Zadiriev, I. I., Shvydkii, G. V., Vavilin, K. V., Kralkina, E. A., Nikonov, A. M.

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Features of RF low-pressure discharge with inductive and capacitive channels von Kralkina, E A, Nekliudova, P A, Pavlov, V B, Petrov, A K, Vavilin, K V

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RF power absorption by plasma of a low-pressure inductive discharge von Kralkina, E A, Rukhadze, A A, Pavlov, V B, Vavilin, K V, Nekliudova, P A, Petrov, A K, Alexandrov, A F

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Effect of an External Magnetic Field on the Absorption Efficiency of the RF Power in a Spatially Bounded Inductive Plasma Source von Nekliudova, P. A., Kralkina, E. A., Vavilin, K. V., Zadiriyev, I. I., Nikonov, A. M.

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RF power absorption by plasma of low pressure low power inductive discharge located in the external magnetic field von Kralkina, E. A., Rukhadze, A. A., Nekliudova, P. A., Pavlov, V. B., Petrov, A. K., Vavilin, K. V.

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Plasma Parameters in the Reactor with Simultaneous Magnetron Discharge and Inductive Radio-Frequency Discharge in the Presence of External Magnetic Field von Aleksandrov, A. F., Vavilin, K. V., Kral’kina, E. A., Neklyudova, P. A., Nikonov, A. M., Pavlov, V. B., Airapetov, A. A., Odinokov, V. V., Pavlov, G. Ya, Sologub, V. A.

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Mathematical simulation of a low-pressure capacitive RF discharge in an external radial magnetic field using the KARAT code von Zadiriev, I. I., Rukhadze, A. A., Kral’kina, E. A., Vavilin, K. V., Pavlov, V. B., Tarakanov, V. P.

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Hybrid plasma system for magnetron deposition of coatings with ion assistance von Vavilin, K V, Kralkina, E A, Nekludova, P A, Petrov, A. K, Nikonov, A M, Pavlov, V B, Airapetov, A A, Odinokov, V V, Pavlov, G Ya, Sologub, V A

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Erratum to: Investigation of the Helicon Discharge Plasma Parametersin a Hybrid RF Plasma System von Aleksandrov, A. F., Petrov, A. K., Vavilin, K. V., Kralkina, E. A., Neklyudova, P. A., Nikonov, A. M., Pavlov, V. B., Ayrapetov, A. A., Odinokov, V. V., Sologub, V. A., Pavlov, G. Ya

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Investigation of the helicon discharge plasma parameters in a hybrid RF plasma system von Aleksandrov, A. F., Petrov, A. K., Vavilin, K. V., Kralkina, E. A., Neklyudova, P. A., Nikonov, A. M., Pavlov, V. B., Ayrapetov, A. A., Odinokov, V. V., Sologub, V. A., Pavlov, G. Ya

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Experimental study of the plasma flow created by a low-power helicon source and approaches to increase the average energy of its ion component von Zadiriev, I.I., Kralkina, E.A., Shvydkiy, G.V., Nikonov, A.M., Vavilin, K.V.

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Influence of external conditions on physical processes and plasma parameters in a model of a high-frequency hybrid plasma system von Aleksandrov, A. F., Petrov, A. K., Vavilin, K. V., Kral’kina, E. A., Neklyudova, P. A., Nikonov, A. M., Pavlov, V. B., Airapetov, A. A., Odinokov, V. V., Pavlov, G. Ya, Sologub, V. A.

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