Processes during annealing of Ti–Al–Ni and Ti–Al–Ni–Au contact metallization systems von Vanyukhin, K. D., Zakharchenko, R. V., Kargin, N. I., Pashkov, M. V., Seidman, L. A.

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Technological features of the formation of transparent conductive contacts of ITO film for LEDs based on gallium nitride von Vanyukhin, K. D., Zakharchenko, R. V., Kargin, N. I., Seidman, L. A.

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Studying the uniformity of the surface resistance of Ti, Al, Ni, Cr, and Au metal films on silicon von Vanyukhin, K. D., Kobeleva, S. P., Kontsevoi, Yu. A., Kurmachev, V. A., Seidman, L. A.

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