Optima MD: Mid-Dose, Hybrid-Scan Ion Implanter von Wenzel, K W, Ray, A M, Vanderberg, B H, Rathmell, R D

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Parametric scaling study of a magnetically insulated thermionic vacuum switch von Vanderberg, B.H., Eninger, J.E.

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Reduction of crossed-field diode transmitted current due to anode secondary emission von Gopinath, V. P., Vanderberg, B. H.

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Recent advances in plasma-based ion sources for commercial ion implantation of semiconductors von Horsky, T.N., Vanderberg, B.H.

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Importance of repeller voltage on ion current generation in an arc ion source von Vanderberg, B.H., Horsky, T.N.

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Measurement and interpretation of current transmission in a crossed-field diode below cutoff von Vanderberg, Bo H., Eninger, Jan E.

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Scaling Experiments On A Magnetically Insulated Thermionic Vacuum Switch von Eninger, J.E., Vanderberg, B.H.

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Ion implantation system having beam angle control in drift and deceleration modes von VANDERBERG, BO H, EISNER, EDWARD C

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SYSTEM AND METHOD TO IMPROVE PRODUCTIVITY OF HYBRID SCAN ION BEAM IMPLANTERS von VANDERBERG BO H, RAY ANDY M

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SYSTEMS AND METHODS FOR BEAM ANGLE ADJUSTMENT IN ION IMPLANTERS WITH BEAM DECELARATION von VANDERBERG BO H, EISNER EDWARD C

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Combined Electrostatic Lens System for Ion Implantation von VANDERBERG BO H, EISNER EDWARD C

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Beam line design to reduce energy contamination von VANDERBERG BO H, EISNER EDWARD C

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HYBRID SCANNING FOR ION IMPLANTATION von VANDERBERG BO H

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Beam Profiling Speed Enhancement for Scanned Beam Implanters von VANDERBERG BO H, EISNER EDWARD C, RAY ANDY M

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System and method for ion implantation with improved productivity and uniformity von VANDERBERG BO H, EISNER EDWARD C

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System and method for ion implantation with improved productivity and uniformity von RAY ANDY, VANDERBERG BO H, HAYS STEVEN C

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BEAM LINE DESIGN TO REDUCE ENERGY CONTAMINATION von VANDERBERG BO H, EISNER EDWARD C

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Ion implantation system having beam angle control in drift and deceleration modes von VANDERBERG, BO H, EISNER, EDWARD C

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SYSTEM AND METHOD FOR ION IMPLANTATION WITH IMPROVED PRODUCTIVITY AND UNIFORMITY von VANDERBERG BO H, EISNER EDWARD C

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Uniformity of a scanned ion beam von RAY ANDY, VANDERBERG BO H, EISNER EDWARD C

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