Physics of Submicron Lithography von Valiev, Kamil A

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Physics of Submicron Lithography von Valiev, Kamil A

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Quantum computers and quantum computations von Valiev, Kamil' A

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Quantum computers: can they be made 'large'? von Valiev, Kamil' A

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Quantum computers and quantum computations von Valiev, Kamil' A.

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Kev Minullinovich Salikhov (on his seventieth birthday) von Aminov, L K, Andreev, Aleksandr F, Bagaev, Sergei N, Valiev, Kamil' A, Voronkova, V K, Il'yasov, A V, Molin, Yuri N, Ovchinnikov, Igor V, Sagdeev, Renad Z, Tarasov, V F, Khaibullin, I B, Tsvetkov, Yury D

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In memory of Vladimir Markovich Eleonskii von Borisov, Aleksei B, Borisov, B S, Valiev, Kamil' A, Zhdanov, V M, Zakharov, V E, Ivanov, B A, Izyumov, Yurii A, Kokin, A A, Kulagin, N E, Popkov, A F, Rukhadze, Anri A, Silin, Viktor P

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Quantum computers: can they be made 'large'? von Valiev, Kamil' A.

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Kev Minullinovich Salikhov (on his seventieth birthday) von Aminov, L.K., Andreev, Aleksandr F., Bagaev, S.N., Valiev, Kamil' A., Voronkova, V.K., Il'yasov, A.V., Molin, Yuri N., Ovchinnikov, I.V., Sagdeev, Roal'd Z., Tarasov, V.F., Khaibullin, I.B., Tsvetkov, Yu.D.

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Introduction von Valiev, Kamil A.

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The Physics of the Interactions between Fast Electrons and Matter von Valiev, Kamil A.

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The Physics of X-Ray Microlithography von Valiev, Kamil A.

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Optical Lithography von Valiev, Kamil A.

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The Physics of Ion-Beam Lithography von Valiev, Kamil A.

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Procedures for Processing Exposed Resist Films and Resist Mask Topography von Valiev, Kamil A.

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Forming Electron Beams of Submicron Cross Section von Valiev, Kamil A.

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Present-day Semiconductor Microelectronics and the Prospects of its Development von Valiev, Kamil' A

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In memory of Vladimir Markovich Eleonskii von Borisov, Aleksei B., Borisov, B.S., Valiev, Kamil' A., Zhdanov, V.M., Zakharov, V.E., Ivanov, B.A., Izyumov, Yurii A., Kokin, A.A., Kulagin, N.E., Popkov, A.F., Rukhadze, Anri A., Silin, Viktor P.

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GEAR FOR MACHINING SURFACE OF SAMPLES WITH RADIATION OF SPECTRAL RANGE OF 110-180 NM von VALIEV KAMIL A, VELIKOV LEONID V, DUSHENKOV SERGEJ D

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PROCESS OF ETCHING OF SILICON DIOXIDE ON SILICON SUBSTRATE von VALIEV KAMIL A, VELIKOV LEONID V, DUSHENKOV SERGEJ D

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