Nanometer size hole fabrication in 2d ultrathin films with cluster ion beams von Insepov, Z., Ainabayev, A., Kirkpatrick, S., Walsh, M., Vyatkin, A. F.

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Controlled Synthesis of Graphene on Copper Using the Method of Implantation of Carbon Recoil Atoms von Vyatkin, A. F.

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Kinetics of Hydrogen Evolution during Ammonia Borane Hydrolysis with Cobalt-Based Catalysts von Dyankova, N. Ya, Lapin, N. V., Grinko, V. V., Vyatkin, A. F.

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Kinetics of Sodium Borohydride Hydrolysis in Comparison with Ammonia Borane Using Cobalt Catalysts von Dyankova, N. Ya, Lapin, N. V., Grinko, V. V., Bezhok, V. S., Vyatkin, A. F.

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The role of point defects in strain relaxation in epitaxially grown SiGe structures von Vyatkin, A.F.

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Multiscale simulation of ion beam impacts on a graphene surface von Dybyspayeva, K B, Zhuldassov, A, Ainabayev, A, Vyatkin, A F, Alekseev, K, Insepov, Z

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Precision depth profiling of nanoelectronic structures using secondary molecular ions in secondary-ion mass spectrometry von Pustovit, A. N., Vyatkin, A. F.

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SU8 photoresist as an etch mask for local deep anodic etching of silicon von Starkov, V. V., Gavrilin, E. Yu, Konle, J., Presting, H., Vyatkin, A. F., König, U.

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Physical Ion Sputtering At Glancing Angles As A Novel IC De-processing Technique von Vyatkin, A. F., Zinenko, V. I.

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Low-temperature strain relaxation in SiGe/Si heterostructures implanted with Ge + ions von Avrutin, V.S., Izyumskaya, N.F., Vyatkin, A.F., Zinenko, V.I., Agafonov, Yu.A., Irzhak, D.V., Roshchupkin, D.V., Steinman, E.A., Vdovin, V.I., Yugova, T.G.

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High-dose V+ implantation in ZnO thin film structures von Vyatkin, A.F., Zinenko, V.I., Agaphonov, Yu.A., Pustovit, A.N., Roshchupkin, D.V., Reuss, F., Kirchner, C., Kling, R., Waag, A.

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Narrowband spectral filters on the basis of threadlike metal Si photonic crystals von Barabanenkov, M. Yu, Vyatkin, A. F.

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Precipitation, epitaxy and nucleation in nickel implanted a-Si von Kuznetsov, A.Yu, Khodos, I.I., Mordkovich, V.N., Vyatkin, A.F.

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Preparation of hydrogen for feeding fuel cells by low-temperature conversion of ethanol on Ni/ZnO and Ni-Cu/ZnO catalysts von Lapin, N. V., Bezhok, V. S., Vyatkin, A. F.

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Interactions between hydrogen and Pd-Ag-alloy thin-film structures von Vyatkin, A. F., Volkov, V. T., Eremenko, V. G., Kasumov, Y. A., Kolchina, A. S.

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Study of silicon strip waveguides with diffraction gratings and photonic crystals tuned to a wavelength of 1.5 µm von Barabanenkov, M. Yu, Vyatkin, A. F., Volkov, V. T., Gruzintsev, A. N., Il’in, A. I., Trofimov, O. V.

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Integrated circuit failure analysis using physical ion sputtering von Vyatkin, A. F., Zinenko, V. I.

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Experimental investigations of the initial stages of Pd-Ag alloy thin film growth von Vyatkin, A. F., Volkov, V. T., Eremenko, V. G., Kasumov, Y. A., Kolchina, A. S.

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Low-temperature strain relaxation in ion-irradiated pseudomorphic SiGe/Si structures von Avrutin, V.S, Izyumskaya, N.F, Vyatkin, A.F, Zinenko, V.I, Agafonov, Yu.A, Irzhak, D.V, Roshchupkin, D.V, Steinman, E.A, Vdovin, V.I, Yugova, T.G

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Polyenergy ion beam synthesis of buried oxynitride layer in silicon von Barabanenkov, M.Yu, Agafonov, Yu.A., Mordkovich, V.N., Pustovit, A.N., Vyatkin, A.F., Zinenko, V.I.

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