Advanced mask aligner lithography: fabrication of periodic patterns using pinhole array mask and Talbot effect von Stuerzebecher, Lorenz, Harzendorf, Torsten, Vogler, Uwe, Zeitner, Uwe D, Voelkel, Reinhard

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Advanced mask aligner lithography: new illumination system von Voelkel, Reinhard, Vogler, Uwe, Bich, Andreas, Pernet, Pascal, Weible, Kenneth J, Hornung, Michael, Zoberbier, Ralph, Cullmann, Elmar, Stuerzebecher, Lorenz, Harzendorf, Torsten, Zeitner, Uwe D

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Unified rule based correction for corners in proximity lithography mask using high resolution features von Puthankovilakam, Krishnaparvathy, Scharf, Toralf, Herzig, Hans Peter, Vogler, Uwe, Voelkel, Reinhard

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Customized illumination for process window optimization and yield improvement in mask aligner lithography systems von Hornung, Michael, Vogler, Uwe, Voelkel, Reinhard

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COMPONENT FOR MANUFACTURING MICRO- AND/OR NANOSTRUCTURED DEVICES AND METHOD OF MANUFACTURING THE SAME von VOGLER, Uwe, SARCLETTI, Marco

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Component for Manufacturing Micro- and/or Nanostructured Devices and Method of Manufacturing the Same von UWE VOGLER, MARCO SARCLETTI

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Component for manufacturing micro-and/or nano-structured devices and method for manufacturing same von VOGLER UWE, SARCLETTI MARCO

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Stamp replication device and method for producing a holding means for a stamp replication device as well as a stamp von GHAZAHLEH JALALI, UWE VOGLER, CHRISTIAN MAY, FABIAN PAWLITZEK, GEORG FINK

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STAMP REPLICATION DEVICE AND METHOD FOR PRODUCING A HOLDING MEANS FOR A STAMP REPLICATION DEVICE AS WELL AS A STAMP von PAWLITZEK, Fabian, MAY, Christian, VOGLER, Uwe, JALALI, Ghazahleh, FINK, Georg

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METHOD AND DEVICE FOR MEASURING DISTANCE USING A DIFFRACTIVE STRUCTURE von VOGLER, Uwe, HARZENDORF, Torsten, ZEITNER, Uwe D, STÜRZEBECHER, Lorenz, VÖLKEL, Reinhard

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STAMP REPLICATION DEVICE AND METHOD FOR PRODUCING A HOLDING MEANS FOR A STAMP REPLICATION DEVICE AS WELL AS A STAMP von VOGLER UWE, MAY CHRISTIAN, FINK GEORG, JALALI GHAZAHLEH, PAWLITZEK FABIAN

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STAMP REPLICATION DEVICE AND METHOD FOR PRODUCING HOLDING MEANS FOR STAMP REPLICATION DEVICE AS WELL AS STAMP von GHAZAHLEH JALALI, UWE VOGLER, CHRISTIAN MAY, FABIAN PAWLITZEK, GEORG FINK

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METHOD AND DEVICE FOR MEASURING DISTANCE USING A DIFFRACTIVE STRUCTURE von HARZENDORF, TORSTEN, VÖLKEL, REINHARD, VOGLER, UWE, STÜRZEBECHER, LORENZ, ZEITNER, UWE D

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Illumination system for a microlithographic contact and proximity exposure apparatus von VOELKEL, REINHARD, VOGLER, UWE, KAISER, PAUL, HORNUNG, MICHAEL, WEIBLE, KENNETH J, CULLMANN, ELMAR, BICH, ANDREAS, EISNER, MARTIN, ZOBERBIER, RALPH

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Illumination system for a microlithographic contact and proximity exposure apparatus von VOELKEL, REINHARD, VOGLER, UWE, KAISER, PAUL, HORNUNG, MICHAEL, WEIBLE, KENNETH J, CULLMANN, ELMAR, BICH, ANDREAS, EISNER, MARTIN, ZOBERBIER, RALPH

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High-power modular LED-based illumination systems for mask-aligner lithography von Bernasconi, Johana, Scharf, Toralf, Vogler, Uwe, Herzig, Hans Peter

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METHOD AND DEVICE FOR MEASURING DISTANCE USING A DIFFRACTIVE STRUCTURE von HARZENDORF, TORSTEN, VOGLER, UWE, VOELKEL, REINHARD, STUERZEBECHER, LORENZ, ZEITNER, UWE D

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Verfahren und Vorrichtung zur Abstandsmessung mit einer diffraktiven Struktur von HARZENDORF, TORSTEN, VOGLER, UWE, VOELKEL, REINHARD, STUERZEBECHER, LORENZ, ZEITNER, UWE D

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METHOD AND DEVICE FOR MEASURING DISTANCE USING A DIFFRACTIVE STRUCTURE von HARZENDORF, TORSTEN, VOGLER, UWE, VOELKEL, REINHARD, STUERZEBECHER, LORENZ, ZEITNER, UWE D

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Author Correction: Defined Geldrop Cultures Maintain Neural Precursor Cells von Vogler, Steffen, Prokoph, Silvana, Freudenberg, Uwe, Binner, Marcus, Tsurkan, Mikhail, Werner, Carsten, Kempermann, Gerd

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