Translating Biomolecular Recognition into Nanomechanics von Fritz, J., Baller, M. K., Lang, H. P., Rothuizen, H., Vettiger, P., Meyer, E., H.-J. Güntherodt, Ch. Gerber, Gimzewski, J. K.

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High-aspect-ratio, ultrathick, negative-tone near-UV photoresist and its applications for MEMS von Lorenz, H., Despont, M., Fahrni, N., Brugger, J., Vettiger, P., Renaud, P.

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Microfabricated photoplastic cantilever with integrated photoplastic/carbon based piezoresistive strain sensor von Gammelgaard, L., Rasmussen, P. A., Calleja, M., Vettiger, P., Boisen, A.

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SU-8: a low-cost negative resist for MEMS von Lorenz, H, Despont, M, Fahrni, N, LaBianca, N, Renaud, P, Vettiger, P

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The "millipede" - nanotechnology entering data storage von Vettiger, P., Cross, G., Despont, M., Drechsler, U., Durig, U., Gotsmann, B., Haberle, W., Lantz, M.A., Rothuizen, H.E., Stutz, R., Binnig, G.K.

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Wafer-scale microdevice transfer/interconnect: its application in an AFM-based data-storage system von Despont, M., Drechsler, U., Yu, R., Pogge, H.B., Vettiger, P.

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Design of atomic force microscope cantilevers for combined thermomechanical writing and thermal reading in array operation von King, W.P., Kenny, T.W., Goodson, K.E., Cross, G.L.W., Despont, M., Durig, U.T., Rothuizen, H., Binnig, G., Vettiger, P.

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Ion-beam patterning of magnetic films using stencil masks von Terris, B. D., Folks, L., Weller, D., Baglin, J. E. E., Kellock, A. J., Rothuizen, H., Vettiger, P.

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Millipede - a MEMS-based scanning-probe data-storage system von Eleftheriou, E., Antonakopoulos, T., Binnig, G.K., Cherubini, G., Despont, M., Dholakia, A., Durig, U., Lantz, M.A., Pozidis, H., Rothuizen, H.E., Vettiger, P.

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Ultrahigh-density atomic force microscopy data storage with erase capability von Binnig, G., Despont, M., Drechsler, U., Häberle, W., Lutwyche, M., Vettiger, P., Mamin, H. J., Chui, B. W., Kenny, T. W.

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Polymer-based stress sensor with integrated readout von Thaysen, J, Yalçinkaya, A D, Vettiger, P, Menon, A

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A cantilever array-based artificial nose von Baller, M.K, Lang, H.P, Fritz, J, Gerber, Ch, Gimzewski, J.K, Drechsler, U, Rothuizen, H, Despont, M, Vettiger, P, Battiston, F.M, Ramseyer, J.P, Fornaro, P, Meyer, E, Güntherodt, H.-J

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VLSI-NEMS chip for parallel AFM data storage von Despont, M., Brugger, J., Drechsler, U., Dürig, U., Häberle, W., Lutwyche, M., Rothuizen, H., Stutz, R., Widmer, R., Binnig, G., Rohrer, H., Vettiger, P.

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All-stencil transistor fabrication on 3D silicon substrates von Villanueva, L G, Vazquez-Mena, O, Martin-Olmos, C, Savu, V, Sidler, K, Montserrat, J, Langlet, P, Hibert, C, Vettiger, P, Bausells, J, Brugger, J

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Parallel optical readout of cantilever arrays in dynamic mode von Koelmans, W W, van Honschoten, J, de Vries, J, Vettiger, P, Abelmann, L, Elwenspoek, M C

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Highly parallel data storage system based on scanning probe arrays von Lutwyche, M. I., Despont, M., Drechsler, U., Dürig, U., Häberle, W., Rothuizen, H., Stutz, R., Widmer, R., Binnig, G. K., Vettiger, P.

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Sequential position readout from arrays of micromechanical cantilever sensors von Lang, H. P., Berger, R., Andreoli, C., Brugger, J., Despont, M., Vettiger, P., Gerber, Ch, Gimzewski, J. K., Ramseyer, J. P., Meyer, E., Güntherodt, H.-J.

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Miniaturized single-crystal silicon cantilevers for scanning force microscopy von Yang, J. L., Despont, M., Drechsler, U., Hoogenboom, B. W., Frederix, P. L. T. M., Martin, S., Engel, A., Vettiger, P., Hug, H. J.

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Soft, entirely photoplastic probes for scanning force microscopy von Genolet, G., Brugger, J., Despont, M., Drechsler, U., Vettiger, P., de Rooij, N. F., Anselmetti, D.

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Ultrahigh density, high-data-rate NEMS-based AFM data storage system von Vettiger, P., Brugger, J., Despont, M., Drechsler, U., Dürig, U., Häberle, W., Lutwyche, M., Rothuizen, H., Stutz, R., Widmer, R., Binnig, G.

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