Frustrated Total Internal Reflection Spectra of Diazoquinone–Novolac Photoresist Films von Brinkevich, S. D., Brinkevich, D. I., Prosolovich, V. S., Lastovskii, S. B., Pyatlitski, A. N.

Volltext

Ion Implantation in Diazoquinone–Novolac Photoresist von Brinkevich, D. I., Brinkevich, S. D., Prosolovich, V. S.

Volltext

Radiation-Induced Alteration of the Reflection Spectra of Diazoquinone–Novolac Photoresist Films by Implantation of Ag+ Ions von Kharchenko, A. A., Brinkevich, D. I., Brinkevich, S. D., Prosolovich, V. S.

Volltext

Fourier-IR Spectroscopy of Photoresist/Silicon Structures for Explosive Lithography von Brinkevich, D. I., Grinyuk, E. V., Brinkevich, S. D., Prosolovich, V. S., Kolos, V. V., Zubova, O. A., Lastovskii, S. B.

Volltext

Adhesion of Electron-Irradiated Diazoquinone–Novolac Photoresist Films to Single-Crystal Silicon von Vabishchevich, S. A., Vabishchevich, N. V., Brinkevich, S. D., Brinkevich, D. I., Prosolovich, V. S., Lastovskii, S. B.

Volltext

Modification of Diazoquinone–Novolac Photoresist Films beyond the Region of Implantation of B+ Ions von Brinkevich, S. D., Grinyuk, E. V., Brinkevich, D. I., Prosolovich, V. S.

Volltext

IR-Fourier Spectroscopy of Attenuated Total Internal Reflection of Polyimide Films on Single-Crystal Silicon Wafers von Prosolovich, V. S., Brinkevich, D. I., Grinyuk, E. V., Brinkevich, S. D., Kolos, V. V., Zubova, O. A., Lastovskii, S. B.

Volltext

Modification of Diazoquinone-Novolac Photoresist Films by the Implantation of Antimony Ions von Brinkevich, S. D., Brinkevich, D. I., Prosolovich, V. S.

Volltext

Influence of Nickel Impurity on the Operating Parameters of a Silicon Solar Cell von Kenzhaev, Z. T., Zikrillaev, N. F., Odzhaev, V. B., Ismailov, K. A., Prosolovich, V. S., Zikrillaev, Kh. F., Koveshnikov, S. V.

Volltext

Adhesion of Irradiated Diazoquinone–Novolac Photoresist Films to Single-Crystal Silicon von Vabishchevich, S. A., Brinkevich, S. D., Vabishchevich, N. V., Brinkevich, D. I., Prosolovich, V. S.

Volltext

Adhesion of Diazoquinone–Novolac Photoresist Films Implanted with Boron and Phosphorus Ions to Single-Crystal Silicon von Vabishchevich, S. A., Brinkevich, S. D., Brinkevich, D. I., Prosolovich, V. S.

Volltext

Influence of Structural Defects on the Electrophysical Parameters of pin-Photodiodes von Koval’chuk, N. S., Lastovskii, S. B., Odzhaev, V. B., Petlitskii, A. N., Prosolovich, V. S., Shestovsky, D. V., Yavid, V. Yu, Yankovskii, Yu. N.

Volltext

Attenuated Total Reflection Spectra of Nitrided SiO2/Si Structures von Odzhaev, V. B., Pyatlitski, A. N., Prosolovich, V. S., Kovalchuk, N. S., Soloviev, Ya. A., Zhygulin, D. V., Shestovsky, D. V., Yankovski, Yu. N., Brinkevich, D. I.

Volltext

Radiation-Induced Processes in Diazoquinone–Novolac Resist Films under Irradiation with 60Co γ-Rays von Brinkevich, S. D., Brinkevich, D. I., Prosolovich, V. S., Sverdlov, R. L.

Volltext

Electrophysical Parameters of PIN Photodiodes Irradiated with 60Co γ-Quanta von Kovalchuk, N. S., Lastovskii, S. B., Odzhaev, V. B., Petlitskii, A. N., Prosolovich, V. S., Shestovskii, D. V., Yavid, V. Yu, Yankovskii, Yu. N.

Volltext

Transformation of the Spectra of a Attenuated Total Reflection when Drying a Diazoquinone-Novolach Photoresist von Brinkevich, D. I., Brinkevich, S. D., Petlitsky, A. N., Prosolovich, V. S.

Volltext

Mechanism of the Adhesive Interaction of Diazoquinone-Novolac Photoresist Films with Monocrystalline Silicon von Brinkevich, S. D., Grinyuk, E. V., Brinkevich, D. I., Sverdlov, R. L., Prosolovich, V. S., Pyatlitski, A. N.

Volltext

Effect of Process-Related Impurities on the Electrophysical Parameters of a MOS Transistor von Odzhaev, V. B., Petlitskii, A. N., Prosolovich, V. S., Filipenya, V. A., Yavid, V. Yu, Yankovskii, Yu. N.

Volltext

Processes Induced in DLC/Polyimide Structures by Irradiation with 60Co γ-Rays von Kharchenko, A. A., Fedotova, Yu. A., Zur, I. A., Brinkevich, D. I., Brinkevich, S. D., Grinyuk, E. V., Prosolovich, V. S., Movchan, S. A., Remnev, G. E., Linnik, S. A., Lastovskii, S. B.

Volltext

EPR Spectroscopy of Diazoquinone–Novolac Resist Films Implanted with P+ and B+ Ions von Brinkevich, D. I., Brinkevich, S. D., Oleshkevich, A. N., Prosolovich, V. S., Odzhaev, V. B.

Volltext