Metasurface Fabrication by Cryogenic and Bosch Deep Reactive Ion Etching von Baracu, Angela M, Dirdal, Christopher A, Avram, Andrei M, Dinescu, Adrian, Muller, Raluca, Jensen, Geir Uri, Thrane, Paul Conrad Vaagen, Angelskår, Hallvard

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Towards high-throughput large-area metalens fabrication using UV-nanoimprint lithography and Bosch deep reactive ion etching von Dirdal, Christopher A, Jensen, Geir Uri, Angelskår, Hallvard, Vaagen Thrane, Paul Conrad, Gjessing, Jo, Ordnung, Daniel Alfred

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Biocompatible bonding of a rigid off-stoichiometry thiol-ene-epoxy polymer microfluidic cartridge to a biofunctionalized silicon biosensor von Sønstevold, Linda, Yadav, Mukesh, Arnfinnsdottir, Nina Bjørk, Herbjørnrød, Aina Kristin, Jensen, Geir Uri, Aksnes, Astrid, Mielnik, Michal Marek

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Biocompatible bonding of a rigid off-stoichiometry thiol-ene-epoxy polymer microfluidic cartridge to a biofunctionalized silicon biosensor von Sønstevold, Linda, Yadav, Mukesh, Arnfinnsdottir, Nina Bjørk, Herbjørnrød, Aina Kristin, Jensen, Geir Uri, Aksnes, Astrid, Mielnik, Michal Marek

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Towards high-throughput large-area metalens fabrication using UV-nanoimprint lithography and Bosch deep reactive ion etching von Dirdal, Christopher Andrew, Jensen, Geir Uri, Angelskår, Hallvard, Thrane, Paul Conrad Vaagen, Gjessing, Jo, Ordnung, Daniel Alfred

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High aspect ratio deep RIE for novel 3D radiation sensors in high energy physics applications von Kok, A., Hansen, T.-E., Hansen, T., Jensen, G.U., Lietaer, N., Mielnik, M., Storas, P.

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Metasurface Fabrication by Cryogenic and Bosch Deep Reactive Ion Etching von Baracu, Angela, Dirdal, Christopher Andrew, Avram, Andrei, Dinescu, Adrian, Muller, Raluca, Jensen, Geir Uri, Thrane, Paul Conrad Vaagen, Angelskår, Hallvard

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Modeling of micromachined silicon-polymer 2-2 composite matching layers for 15 MHz ultrasound transducers von Manh, Tung, Jensen, Geir, Johansen, Tonni, Hoff, Lars

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Microfabricated 1-3 composite acoustic matching layers for 15 MHz transducers von Manh, Tung, Jensen, Geir Uri, Johansen, Tonni F, Hoff, Lars

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Microfabricated 1–3 composite acoustic matching layers for 15MHz transducers von Manh, Tung, Jensen, Geir Uri, Johansen, Tonni F., Hoff, Lars

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Dielectric properties of thin-film ZrO2 up to 50 GHz for RF MEMS switches von Min, Deokki, Hoivik, Nils, Jensen, Geir Uri, Tyholdt, Frode, Haavik, Camilla, Hanke, Ulrik

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Plastic Deformation of Thin Si Membranes in Si-Si Direct Bonding von Poppe, Erik, Jensen, Geir Uri, Moe, Sigurd Teodor, Wang, Dag

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Plastic Deformation of Thin Si Membranes in Si-Si Direct Bonding von Poppe, Erik Utne, Jensen, Geir Uri, Moe, Sigurd T., Wang, Dag Thorstein

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Modeling of micromachined silicon–polymer 2-2 composite matching layers for 15MHz ultrasound transducers von Manh, Tung, Jensen, Geir Uri, Johansen, Tonni F., Hoff, Lars

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Dielectric properties of thin-film Zr02 up to 50 GHz for RF MEMS switches von MIN, Deokki, HOIVIK, Nils, URI JENSEN, Geir, TYHOLDT, Frode, HAAVIK, Camilla, HANKE, Ulrik

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Tuning of resist slope with hard-baking parameters and release methods of extra hard photoresist for RF MEMS switches von Saha, Shimul Chandra, Sagberg, Håkon, Poppe, Erik, Jensen, Geir Uri, Fjeldly, Tor A., Sæther, Trond

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Recent detector developments at SINTEF (industrial presentation) von Sundby Avset, Berit, Evensen, Lars, Uri Jensen, Geir, Mo, Sjur, Kari Schjølberg-Henriksen, Westgaard, Trond

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Electrical Characterization and Preliminary Beam Test Results of 3D Silicon CMS Pixel Detectors von Koybasi, O, Alagoz, E, Krzywda, A, Arndt, K, Bolla, G, Bortoletto, D, Hansen, Thor-Erik, Hansen, T A, Jensen, G U, Kok, A, Kwan, S, Lietaer, N, Rivera, R, Shipsey, I, Uplegger, L, Da Via, C

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Electrical Characterization and Preliminary Beam Test Results of 3D Silicon CMS Pixel Detectors von Koybasi, Ozhan, Alagoz, Enver, Krzywda, Alex, Arndt, Kirk, Bolla, Gina, Bortoletto, Daniela, Hansen, Thor-Erik, Hansen, Trond Andreas, Jensen, Geir Uri, Kok, Angela Chun Ying, Kwan, Simon, Lietaer, Nicolas, Rivera, Ryan, Shipsey, Ian, Uplegger, Lorenzo, Da Via, Cinzia

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Design, Simulation, Fabrication, and Preliminary Tests of 3D CMS Pixel Detectors for the Super-LHC von Koybasi, Ozhan, Bortoletto, Daniela, Hansen, Thor-Erik, Kok, Angela, Hansen, Trond Andreas, Lietaer, Nicolas, Jensen, Geir Uri, Summanwar, Anand, Bolla, Gino, Kwan, Simon Wing Lok

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