Defect Formation Behaviors in Heavily Doped Czochralski Silicon von Sugimura, Wataru, Ono, Toshiaki, Umeno, Shigeru, Hourai, Masataka, Sueoka, Koji

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Review and Comments for the Development of Point Defect‐Controlled CZ‐Si Crystals and Their Application to Future Power Devices von Hourai, Masataka, Nagashima, Toru, Nishikawa, Hideshi, Sugimura, Wataru, Ono, Toshiaki, Umeno, Shigeru

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Calculation of size distribution of void defects in CZ silicon von AKATSUKA, Masanori, OKUI, Masahiko, UMENO, Shigeru, SUEOKA, Koji

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Review and Comments for the Development of Point Defect‐Controlled CZ‐Si Crystals and Their Application to Future Power Devices (Phys. Status Solidi A 10∕2019) von Hourai, Masataka, Nagashima, Toru, Nishikawa, Hideshi, Sugimura, Wataru, Ono, Toshiaki, Umeno, Shigeru

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Dependence of the Grown-in Defect Distribution on Growth Rates in Czochralski Silicon von Sadamitsu, Shinsuke, Umeno, Shigeru, Koike, Yasuo, Hourai, Masataka, Shigeo Sumita, Shigeo Sumita, Tatsuhiko Shigematsu, Tatsuhiko Shigematsu

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Dependence of Grown-in Defect Behavior on Oxygen Concentration in Czochralski Silicon Crystals von Umeno, Shigeru, Yanase, Yoshio, Hourai, Masataka, Sano, Masakazu, Shida, Yoshiaki, Tsuya, Hideki

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ADJUSTMENT STATE EVALUATION METHOD AND ADJUSTMENT METHOD FOR DEFECT EVALUATION APPARATUS von UMENO, Shigeru

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ADJUSTMENT STATE EVALUATION METHOD AND ADJUSTMENT METHOD FOR DEFECT EVALUATION APPARATUS von UMENO, Shigeru

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Relationship between grown-in defects in Czochralski silicon crystals von UMENO, S, OKUI, M, HOURAI, M, SANO, M, TSUYA, H

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ADJUSTMENT STATE EVALUATION METHOD AND ADJUSTMENT METHOD FOR DEFECT EVALUATION APPARATUS von UMENO, Shigeru

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Axial microscopic distribution of grown-in defects in Czochralski-grown silicon crystals von UMENO, S, SADAMITSU, S, MURAKAMI, H, HOURAI, M, SUMITA, S, SHIGEMATSU, T

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Oxygen Diffusivity Analyzed Based on Thermal Donor Formation in Silicon Crystals von Torigoe, Kazuhisa, Umeno, Shigeru, Ono, Toshiaki

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Use of a single crystal silicon wafer for insulated gate bipolar transistors von Umeno, Shigeru

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SILICON WAFER von ONO, Toshiaki, UMENO, Shigeru

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EVALUATION METHOD, EVALUATION SYSTEM, AND MANUFACTURING METHOD FOR SILICON WAFER von UMENO Shigeru

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Study of the phase transition in BaSm2Mn2O7 von KAMEGASHIRA, N, UMENO, S

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DEFECT EVALUATION DEVICE, ADJUSTMENT STATE EVALUATION METHOD, AND ADJUSTMENT METHOD von UMENO SHIGERU

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Method of predicting thermal donor formation behavior in silicon wafer, method of evaluating silicon wafer, and method of producing silicon wafer von Torigoe, Kazuhisa, Umeno, Shigeru, Ono, Toshiaki

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METHOD FOR PRODUCING SILICON SINGLE CRYSTAL von UMENO SHIGERU

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METHOD OF PREDICTING THERMAL DONOR FORMATION BEHAVIOR IN SILICON WAFER, METHOD OF EVALUATING SILICON WAFER, AND METHOD OF PRODUCING SILICON WAFER von Torigoe, Kazuhisa, Umeno, Shigeru, Ono, Toshiaki

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