Toward atom probe tomography of microelectronic devices von Larson, D J, Lawrence, D, Lefebvre, W, Olson, D, Prosa, T J, Reinhard, D A, Ulfig, R M, Clifton, P H, Bunton, J H, Lenz, D, Olson, J D, Renaud, L, Martin, I, Kelly, T F

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Atom probe tomography and transmission electron microscopy of a Mg-doped AlGaN/GaN superlattice von Bennett, S.E., Ulfig, R.M., Clifton, P.H., Kappers, M.J., Barnard, J.S., Humphreys, C.J., Oliver, R.A.

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Cryogenic UHV Specimen Preparation for APT: A Transfer Solution von Rice, KP, Ulfig, RM, Maier, U, Passey, RG

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Correlative Analysis in the Semiconductor Industry von Larson, DJ, Prosa, TJ, Martin, I, Robbes, A-S, Merkulov, A, Bernier, N, Delaye, V, van der Heide, P, Dulac, O, Reinhard, DA, Ulfig, RM

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Measurement of Detection Efficiency in Atom Probe Tomography von Prosa, T.J., Geiser, B.P., Ulfig, R.M., Kelly, T.F., Larson, D.J.

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Performance Advances in LEAP systems von Ulfig, R.M., Larson, D.J., Kelly, T.F., Clifton, P.H., Prosa, T.J., Lenz, D.R, Oltman, E.X.

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Improving Data Quality in Atom Probe Tomography von Larson, D.J., Prosa, T.J., Lawrence, D., Strennen, S.N., Oltman, E., Martin, I., Reinhard, D.A., Giddings, A. D., Olson, D., Bunton, J.H., Ulfig, R.M, Kelly, T.F., Goodwin, J. R., Martens, R.L.

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Atom Probe Tomography Analysis of Grain Boundaries in CdTe von Larson, D.J., Reinhard, D.A., Prosa, T.J., Olson, D., Lawrence, D., Clifton, P.H., Ulfig, R.M., Kelly, T.F., Smentkowski, V.S.

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Performance of local electrodes in the local electrode atom probe von Russell, K.F., Miller, M.K., Ulfig, R.M., Gribb, T.

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New Applications in Atom Probe Tomography von Larson, D.J., Reinhard, D.A., Prosa, T.J., Olson, D., Lawrence, D., Clifton, P.H., Ulfig, R.M., Martin, I., Kelly, T.F., Smentkowski, V.S., Gordon, L.M., Joester, D., Inoue, K.

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Mg dopant distribution in an AlGaN/GaN p-type superlattice assessed using atom probe tomography, TEM and SIMS von Bennett, S E, Clifton, P H, Ulfig, R M, Kappers, M J, Barnard, J S, Humphreys, C J, Oliver, R A

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Field ion specimen preparation from near-surface regions von Larson, D.J, Miller, M.K, Ulfig, R.M, Matyi, R.J, Camus, P.P, Kelly, T.F

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Atom Probe Tomography Productivity Enhancements von Reinhard, D.A., Payne, T.R., Strennen, E.M., Oltman, E., Geiser, B.P., Sobering, G.S., Lenz, D.R., Mandt, J., Groth, G.A., Larson, D.J., Ulfig, R.M., Prosa, T.J.

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A High Multiple Hits Correction Factor for Atom Probe Tomography von Larson, D.J., Prosa, T.J., Oltman, E., Reinhard, D.A., Geiser, B.P., Ulfig, R.M., Merkulov, A.

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Data Quality Improvements in the Voltage-Pulsed LEAP 5000 R/XR von Ulfig, R.M., Prosa, T.J., Lenz, D.R, Payne, T.R.

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Using Spatial Distribution Maps to Estimate APT Efficiency von Geiser, B.P., Larson, D.J., Prosa, T.J., Kelly, T.F., Ulfig, R.M.

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Multi-Region Data Simulation for Detection Limit Investigations in IVAS von Ulfig, R.M., Geiser, B.P., Prosa, T.J., Larson, D.J., Leroux, J., Dupont, B.

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Laser-Specimen Interactions in Atom Probe Tomography von Kelly, T.F., Bunton, J.H., Prosa, T.J., Ulfig, R.M., Clifton, P.H., Larson, D.J.

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New Applications in Atom Probe Tomography von Larson, D.J., Valley, J.W., Ushikubo, T., Miller, M.K., Takamizawa, H., Shimizu, Y., Gordon, L.M., Joester, D., Giddings, D., Reinhard, D.A., Prosa, T.J., Olson, D.P., Lawrence, D.F., Clifton, P.H., Ulfig, R.M., Martin, I., Kelly, T.F.

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Three-Dimensional Compositional Characterization of High-k Gate Dielectrics with LEAP Atom Probe Tomography von Ulfig, Robert M., Thompson, Kieth, Alvis, Roger, Bunton, Joeseph, Gorman, Brian, Larson, David

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