Simulation of a polysilicon LPCVD reactor Fluid-dynamics and Error Analysis von Hopfmann, Ch, Ulacia F., J.I., Werner, Ch

Volltext bestellen

Numerical analysis of fluid flow and nonuniformities in a polysilicon LPCVD batch reactor von Hofmann, Ch, Werner, Ch, Ulacia F., J.I.

Volltext

Flow and reaction simulation of a tungsten CVD reactor von Ulacia F., J.I., Howell, S., Körner, H., Werner, Ch

Volltext

Numerical Simulation of Gas Flow and Temperature in a Diffusion Furnace von Howell, S., Ulacia F., J.I., Werner, Ch

Volltext bestellen

A 3-D fluid simulation of a dry-etching aluminium hexode reactor von Ulacia F, J.I.

Volltext

Equipment simulation of selective tungsten deposition von WERNER, C, ULACIA, J. I, HOPFMANN, C, FLYNN, P

Volltext