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  1. 1
    Anordnung zur Beschichtung von Substraten

    Anordnung zur Beschichtung von Substraten von STEUER, CHRISTOPH, SENS, MARTIN, KRALAPP, UWE, HUMMEL, HENDRIK, UHLEMANN, AIKO, FABER, JOERG, POLLACK, GERD, BARTH, SVEN

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  2. 2
    Arrangement for coating the substrates, comprises coating source and substrate support in vacuum chamber, where coating source is arranged to the support on one-side and the support has rear side pointing towards the coating source

    Arrangement for coating the substrates, comprises coating source and substrate support in vacuum chamber, where coating source is arranged to the support on one-side and the suppor... von STEUER, CHRISTOPH, SENS, MARTIN, KRALAPP, UWE, HUMMEL, HENDRIK, UHLEMANN, AIKO, FABER, JOERG, POLLACK, GERD, BARTH, SVEN

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  3. 3
    Arrangement for vacuum coating of substrate, has transport support element and substrate support element arranged on substrate holder, and bars which are arranged between substrate support element and transport support element

    Arrangement for vacuum coating of substrate, has transport support element and substrate support element arranged on substrate holder, and bars which are arranged between substrate... von STEUER, CHRISTOPH, SENS, MARTIN, DSAAK, TORSTEN, KILIAN, MICHAEL, KRALAPP, UWE, HUMMEL, HENDRIK, MOSSHAMMER, STEFFEN, OBST, HENRIK, UHLEMANN, AIKO, FABER, JOERG, POLLACK, GERD, BARTH, SVEN

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