Micro-electro-mechanical radio-frequency switch fixed electrode by wet etching of AlSi-based multilayer von Tuohiniemi, M.

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Surface-micromachined silicon air-gap Bragg reflector for thermal infrared von Tuohiniemi, M, Blomberg, M

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Optical transmission performance of a surface-micromachined Fabry-Pérot interferometer for thermal infrared von Tuohiniemi, M, Blomberg, M, Akujärvi, A, Antila, J, Saari, H

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Characterization of the tuning performance of a micro-machined Fabry-Pérot interferometer for thermal infrared von Tuohiniemi, M, Näsilä, A, Mäkynen, J

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Micro-machined Fabry-Pérot interferometer for thermal infrared von Tuohiniemi, M., Nasila, A., Antila, J., Saari, H., Blomberg, M.

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A laser-ablation system for deposition of high-temperature superconducting thin films for device applications von Tuohiniemi, M., Kajava, T., Katila, T., Salomaa, M.M., Salomaa, R., Supponen, E.

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Study on Al2O3 Film in Anhydrous HF Vapor von Tuohiniemi, Mikko, Ritala, Heini

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