PROCESS OF DRY ETCHING OF STRUCTURES WITH CONDUCTIVE LAYER OF SURFACE IN TWO-CHAMBER PLANTS von Bazylenko M.V, Gulevich A.N, Tsybul'ko I.A

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GAS MIXTURE FOR SELECTIVE DRY ETCHING OF INSULATING LAYERS von Krasnitskij V.Ja, Turtsevich A.S, Klimenkov V.V, Tsybul'ko I.A

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PLASMA-FORMING MIXTURE FOR PLASMA CHEMICAL TREATMENT OF PINOUT OF ALUMINIUM AND ITS ALLOYS IN MANUFACTURE OF VERY LARGE-SCALE INTEGRAL SCHEMES von Turtsevich A.S, Rodin G.F, Koreshkov G.A, Tsybul'ko I.A, Sasnovskij V.A

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