Wafer Bonding of SiC-AlN at Room Temperature for All-SiC Capacitive Pressure Sensor von Mu, Fengwen, Xu, Yang, Shin, Seongbin, Wang, Yinghui, Xu, Hengyu, Shang, Haiping, Sun, Yechao, Yue, Lei, Tsuyuki, Tatsurou, Suga, Tadatomo, Wang, Weibing, Chen, Dapeng

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High Performance SiC IEMOSFET/SBD Module von Sakai, T., Tawara, Takeshi, Imamura, Kouji, Tanaka, Atsushi, Okumura, Hajime, Makifuchi, Youichi, Harada, Shinsuke, Kawada, Yasuyuki, Ohse, Naoyuki, Kinoshita, Akimasa, Gotoh, Masahide, Tezuka, Kazuo, Sakai, Yoshiyuki, Harada, Yuichi, Tsuji, Takashi, Tsuyuki, Tatsurou, Kimura, Hiroshi, Iwamuro, Noriyuki, Fukuda, Kenji, Hoshi, Yasuyuki, Imai, Fumikazu, Okamoto, Mitsuo, Ryo, Mina, Shimizu, Saburou, Nakamata, Shinichi

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Mass production technology of PbZrTiO3 by sputtering method for piezoelectric MEMS devices von Kobayashi, Hiroki, Matsuoka, Kouhei, Tsuyuki, Tatsurou, Kimura, Isao, Jimbo, Takehito

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High Temperature Ion Implantation and Activation Annealing Technologies for Mass Production of SiC Power Devices von Tsuyuki, Tatsurou, Shimizu, Saburou, Tsuji, Takashi, Kimura, Hiroshi, Iwamuro, Noriyuki, Fukuda, Kenji, Nakamata, Shinichi, Tezuka, Kazuo, Harada, Shinsuke

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Mass production technology of PZT by sputtering method for piezoelectric MEMS devices von Kobayashi, Hiroki, Matsuoka, Kouhei, Tsuyuki, Tatsurou, Kimura, Isao, Jimbo, Takehito

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Researches on high-field (Nb,Ta)3Sn superconducting wires prepared from Jelly Roll process von TACHIKAWA, Kyoji, KOYATA, Ysuyuki, NAKAZE, Takeshi, TSUYUKI, Tatsurou, TAKEUCHI, Takao

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ジェリーロール法による高磁界(Nb,Ta)3Sn超伝導線材の研究

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圧電MEMSデバイス向けPbZrTiO3スパッタ量産化技術 von 小林, 宏樹, 松岡, 耕平, 露木, 達朗, 木村, 勲, 神保, 武人

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圧電MEMSデバイス向けPZTスパッタ量産化技術 von 小林, 宏樹, 松岡, 耕平, 露木, 達朗, 木村, 勲, 神保, 武人

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