A Two-Axis Orthogonal Resonator for Variable Sensitivity Mode Localization Sensing von Nagasaka, Yuta, Baronchelli, Alessia, Tanaka, Shuji, Tsukamoto, Takashiro

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Multi-Ring Disk Resonator with Elliptic Spokes for Frequency-Modulated Gyroscope von Wang, Shihe, Chen, Jianlin, Tsukamoto, Takashiro, Tanaka, Shuji

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Triple Mass Resonator for Electrostatic Quality Factor Tuning von Chen, Jianlin, Tsukamoto, Takashiro, Tanaka, Shuji

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Integration of buried piezoresistive sensors and PZT thin film for dynamic and static position sensing of MEMS actuator von Vergara, Andrea, Tsukamoto, Takashiro, Fang, Weileun, Tanaka, Shuji

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Tailoring material properties of electrochemically deposited Al film from chloroaluminate ionic liquid for microsystem technology using pulsed deposition von Al Farisi, Muhammad Salman, Tsukamoto, Takashiro, Tanaka, Shuji

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Laterally vibrating MEMS resonant vacuum sensor based on cavity-SOI process for evaluation of wide range of sealed cavity pressure von Liu, Cong, Froemel, Joerg, Chen, Jianlin, Tsukamoto, Takashiro, Tanaka, Shuji

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Fabrication method of micromachined quartz glass resonator using sacrificial supporting structures von Khan, Muhammad Jehanzeb, Tsukamoto, Takashiro, Al Farisi, Muhammad Salman, Tanaka, Shuji

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On-chip electrochromic micro display for a disposable bio-sensor chip von Zhu, Yanjun, Tsukamoto, Takashiro, Tanaka, Shuji

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Electroplated Al Press Marking for Wafer-Level Bonding von Al Farisi, Muhammad Salman, Tsukamoto, Takashiro, Tanaka, Shuji

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Automated frequency and quality‐factor matching method for frequency modulated / rate integrating gyroscope von Tsukamoto, Takashiro, Tanaka, Shuji

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Fully Differential Single Resonator FM Gyroscope Using CW/CCW Mode Separator von Tsukamoto, Takashiro, Tanaka, Shuji

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Rate Integrating Gyroscope Using Independently Controlled CW and CCW Modes on Single Resonator von Tsukamoto, Takashiro, Tanaka, Shuji

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Printable on-chip micro battery for disposal bio-sensing device von Tsukamoto, Takashiro, Tanaka, Shuji

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Uncooled infrared thermal imaging sensor using vacuum-evaporated europium phosphor von Wang, Min, Tsukamoto, Takashiro, Tanaka, Shuji

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Wireless Sensor Chip Platform Using On-Chip Electrochromic Micro Display von TSUKAMOTO, Takashiro, ZHU, Yanjun, TANAKA, Shuji

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Infrared thermal detector array using Eu(TTA)3-based temperature sensitive paint for optical readable thermal imaging device von Wang, Min, Tsukamoto, Takashiro, Tanaka, Shuji

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Thermal Imaging Device using Infrared-to-Visible Converter Made of Temperature Sensitive Phosphor von Tsukamoto, Takashiro, Wang, Min, Tanaka, Shuji

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Piezoelectric Moonie‐type Resonant Microactuator von FUJIMURA, YASUHIRO, TSUKAMOTO, TAKASHIRO, TANAKA, SHUJI

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Disposable Wireless Immuno-Sensing Chips von Takashiro, Tsukamoto

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Quad Mass Resonator With Frequency Mismatch of 3 ppm Trimmed by Focused Ion Beam von Chen, Jianlin, Tsukamoto, Takashiro, Tanaka, Shuji

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