Tetrafluorosubstituted Metal Phthalocyanines: Interplay between Saturated Vapor Pressure and Crystal Structure von Klyamer, Darya D, Sukhikh, Aleksander S, Trubin, Sergey V, Gromilov, Sergey A, Morozova, Natalia B, Basova, Tamara V, Hassan, Aseel K

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Breaking through the Thermodynamics “Wilds” of Metal–Organic Chemical Vapor Deposition Precursors: Metal tris-Acetylacetonates von Makarenko, Alexander, Trubin, Sergey, Zherikova, Kseniya

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Thermal decomposition of tungsten hexacarbonyl: CVD of W-containing films under Pd codeposition and VUV assistance von Krisyuk, Vladislav V., Koretskaya, Tatyana P., Turgambaeva, Asiya E., Trubin, Sergey V., Korolkov, Ilya V., Debieu, Olivier, Duguet, Thomas, Igumenov, Igor K., Vahlas, Constantin

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Breaking through the Thermodynamics “Wilds” of Metal–Organic Chemical Vapor Deposition Precursors: Metal Itris/I-Acetylacetonates von Makarenko, Alexander M, Trubin, Sergey V, Zherikova, Kseniya V

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The volatile trimethylplatinum(IV) complexes: Effect of β-diketonate substituents on thermal properties von Dorovskikh, Svetlana I., Krisyuk, Vladislav V., Mirzaeva, Irina V., Komarov, Vladislav Yu, Trubin, Sergey V., Turgambaeva, Asia E., Morozova, Natalia B.

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Thermochemical study of new volatile palladium [beta]-ketohydrazonates for CVD application von Shushanyan, Artem D, Nikolaeva, Nataliya S, Vikulova, Evgeniia S, Zelenina, Ludmila N, Trubin, Sergey V, Sysoev, Sergey V, Dorovskikh, Svetlana I

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MONITORING COMPOSITION AND STRUCTURE OF MOCVD ZrO2-BASED MULTICOMPONENT FILMS BY INNOVATIVE MIXED METAL-ORGANIC PRECURSORS von Krisyuk, V. V., Samélor, D., Turgambaeva, A. E., Esvan, J., Korolkov, I. V., Maksimovskiy, E. A., Trubin, S. V., Shevtsov, Yu. V., Vahlas, C.

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Preparation of Iridium Thin Film by Pulse CVD from Ir(acac)(CO) 2 von Semyannikov, Pyotr P., Morozova, Natalia B., Zherikova, Kseniya V., Trubin, Sergey V., Igumenov, Igor K., Gelfond, Nikolay V.

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Low-Temperature VUV-Stimulated MO CVD Process of Palladium Layer Deposition von Kuchumov, Boris M., Koretskaya, Tat'yana P., Shevtsov, Yuriy V., Trubin, Sergey V., Zharkova, Galina I., Danilovich, Vladimir S., Igumenov, Igor K., Kruchinin, Vladimir

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Pulse CVD Deposition of Ru Films from Ru(II) ή3-Allylic Complex von Trubin, Sergey V., Morozova, Natalia B., Semyannikov, Pyotr P., Bessonov, Alexandr, Gelfond, Nikolay V., Igumenov, Igor K.

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Preparation of Iridium Thin Film by Pulse CVD from Ir(acac)(CO) 2 von Semyannikov, Pyotr P., Morozova, Natalia B., Zherikova, Kseniya V., Trubin, Sergey V., Igumenov, Igor K., Gelfond, Nikolay V.

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VUV-Stimulated MOCVD Processes of Copper Layer Deposition von Igumenov, Igor K., Kuchumov, Boris M., Kozlova, Svetlana, Koretskaya, Tat'yana P., Trubin, Sergey V., Sokuev, Roman, Lyakh, Vladimir, Kruchinin, Vladimir

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Low-Temperature VUV-Stimulated MOCVD Process of Palladium Layer Deposition von Kuchumov, Boris M., Koretskaya, Tat'yana P., Shevtsov, Yuriy V., Trubin, Sergey V., Zharkova, Galina I., Danilovich, Vladimir S., Igumenov, Igor K., Kruchinin, Vladimir

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Method for improving the quality of restoration of noisy compressed images von Medvedeva, E. V., Trubin, I. S.

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Oxygen-free precursor for chemical vapor deposition of gold films: thermal properties and decomposition mechanism von Turgambaeva, Asiya E., Zharkova, Galina, Semyannikov, Petr, Krisyuk, Vladislav V., Koretskaya, Tatyana, Trubin, Sergey, Kuchumov, Boris, Igumenov, Igor

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