Deposition of transparent and conducting indium-tin-oxide films by the r.f.-superimposed DC sputtering technology von Bender, M., Trube, J., Stollenwerk, J.

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Dependence of the electrical and optical behaviour of ITO–silver–ITO multilayers on the silver properties von Klöppel, A., Kriegseis, W., Meyer, B.K., Scharmann, A., Daube, C., Stollenwerk, J., Trube, J.

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Upscaling of texture-etched zinc oxide substrates for silicon thin film solar cells von Müller, J, Schöpe, G, Kluth, O, Rech, B, Ruske, M, Trube, J, Szyszka, B, Jiang, X, Bräuer, G

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Characterization of a RF/dc-magnetron discharge for the sputter deposition of transparent and highly conductive ITO films von BENDER, M, TRUBE, J, STOLLENWERK, J

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Influence of substrate temperature and sputtering atmosphere on electrical and optical properties of double silver layer systems von Klöppel, Andreas, Meyer, Bernd, Trube, Jutta

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In situ temperature and distribution measurements of x-ray von Trube, J., Bernt, H., Engler, K., Huber, H.L.

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Texture-etched zinc oxide substrates for silicon thin film solar cells-from laboratory size to large areas von Muller, J., Schope, G., Kluth, O., Rech, B., Ruske, M., Trube, J., Szyszka, B., Hoing, Th, Jiang, X., Brauer, G.

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Pulse plating of quarter micron gold patterns on silicon X-ray masks von Löchel, B., Macioßek, A., Trube, J., Huber, H.-L.

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Negative-tone high-resolution photocatalytic resist for x-ray lithography von Dammel, R., Dössel, K.-F., Lingnau, J., Theis, J., Huber, H., Oertel, H., Trube, J.

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The International Technology Roadmap for Photovoltaics and the Significance of it's Decade-Long Projections von Baliozian, P, Tepner, S, Fischer, M, Trube, J, Herritsch, S, Gensowski, K, Clement, F, Nold, S, Preu, R

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Application of pulse plating to form lead absorber patterns for X-ray masks von Löchel, B., Trube, J., Windbracke, W., Huber, H.

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Infrared-measurement of X-ray mask heating during sr-lithography von Trube, J., Huber, H.-L., Mourikis, S., Bernstorff, S., Koch, E.E.

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Diamond membranes for x-ray masks von Löchel, B., Schliwinski, H.-J., Huber, H.-L., Trube, J., Schäfer, L., Klages, C.-P., Lüthje, H.

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46.3:Ultra-flat ITO Films for Light Emitting Polymer Applications(2-3.セッション46 OLED MANUFACTURING)(Society for Information Display 00 Report) von oppel, A. Klo, Trube, J., Hoffman, U., Burroughes, J.H., Heeks, S.K., Gunner, A., Ramshaw, T.

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38.2: Deposition of Highly Conductive ITO Thin Films for Display Applications with the rf/dc Process von Bender, M., Trube, J., Stollenwerk, J.

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27.3: New In-Line Machine Concept for OLED Manufacturing von Hoffmann, U., Netuschil, P., Sauer, P., Lotz, H.-G., Klöppel, A., Bender, M., Trube, J.

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46.3: Ultra-flat ITO Films for Light Emitting Polymer Applications von Klöppel, A., Trube, J., Hoffmann, U., Burroughes, J. H., Heeks, S. K., Gunner, A., Ramshaw, T.

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INSITU TEMPERATURE AND DISTORTION MEASUREMENTS OF X-RAY MASKS DURING SR LITHOGRAPHY von TRUBE, J, BERNT, H, ENGLER, K, HUBER, HL

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Predicted properties of Delbrück scattering for photon energies up to 104 MeV von Rullhusen, P, Trube, J, Baumann, A, Rose, KW, Smend, F, Schumacher, aM

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Pulse Plating of Quarter Micron Gold Patterns on Silicon X-Ray Masks von Lochel, B, Maciossek, A, Trube, J, Huber, H-L

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