Comprehensive study of the resistivity of copper wires with lateral dimensions of 100 nm and smaller von Steinhögl, W., Schindler, G., Steinlesberger, G., Traving, M., Engelhardt, M.

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Effect of via/line temperature inhomogeneity on electromigration fast WLR results and how to get rid of inhomogeneities von Traving, M., Walter, W.

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Impact of line edge roughness on the resistivity of nanometer-scale interconnects von Steinhögl, W., Schindler, G., Steinlesberger, G., Traving, M., Engelhardt, M.

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Tungsten interconnects in the nano-scale regime von Steinhögl, W., Steinlesberger, G., Perrin, M., Scheinbacher, G., Schindler, G., Traving, M., Engelhardt, M.

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Phase analysis of TaN/Ta barrier layers in sub-micrometer trench structures for Cu interconnects von Traving, M., Zienert, I., Zschech, E., Schindler, G., Steinhögl, W., Engelhardt, M.

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Recovery of Organic Acids Using Ion-Exchanger-Impregnated Resins von Traving, M., Bart, H.-J.

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Fast wafer level reliability monitoring as a tool to achieve automotive quality for a wafer process von Martin, A., Vollertsen, R.-P., Mitchell, A., Traving, M., Beckmeier, D., Nielen, H.

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Damascene and subtractive processing of narrow tungsten lines: Resistivity and size effect von Traving, M., Schindler, G., Engelhardt, M.

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Nanowire networks on perfectly flat surfaces von Adelung, R., Kipp, L., Brandt, J., Tarcak, L., Traving, M., Kreis, C., Skibowski, M.

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Tracing the valence band maximum during epitaxial growth of HfS2 on WSe2 von KREIS, C, TRAVING, M, ADELUNG, R, KIPP, L, SKIBOWSKI, M

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Scaling of parasitics and delay times in the backend-of-line von Schindler, G, Steinhögl, W, Steinlesberger, G, Traving, M, Engelhardt, M

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Surface behaviour at the charge density wave transition in NbSe2 von MURPHY, B. M, STETTNER, J, TRAVING, M, SPRUNG, M, GROTKOPP, I, MÜLLER, M, OGLESBY, C. S, TOLAN, M, PRESS, W

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Scaling of Metal Interconnects: Challenges to Functionality and Reliability von Engelhardt, M., Schindler, G., Traving, M., Stich, A., Gabric, Z., Pamler, W., Hoenlein, W.

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k-resolved electronic structure of quasi-free 2-dimensional HfS2 clusters von Kreis, C, Traving, M, Adelung, R, Kipp, L, Skibowski, M

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Band bending, surface photovoltage and tunnelling microscopy on WSe2:Rb von Boehme, M., Adelung, R., Traving, M., Kipp, L., Skibowski, M.

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Band structure of the misfit compound (PbS)NbS2 compared to NbSe2: experiment and theory von Brandt, J., Kanzow, J., Roßnagel, K., Kipp, L., Skibowski, M., Krasovskii, E., Schattke, W., Traving, M., Stettner, J., Press, W., Dieker, C., Jäger, W.

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Reliability studies of narrow Cu lines von Schindler, Günther, Penka, Sabine, Steinlesberger, Gernot, Traving, Martin, Steinhögl, Werner, Engelhardt, Manfred

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Phasentrennung durch modifizierte Mikrosiebe von Schwan, P., Traving, M., Becker, C., Bäcker, W., Mutter, M., Warsitz, R.

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Scaling laws for the resistivity increase of sub-100 nm interconnects von Steinhoegl, W., Schindler, G., Steinlesberger, G., Traving, M., Engelhardt, M.

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Separation of Cobalt and Nickel by Reactive Extraction - Modeling of Equilibria von Manski, R., Bart, H.-J., Bäcker, W., Strube, J., Traving, M., Görge, A.

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