Integration of a low permittivity spin-on embedded hardmask for Cu/SiLK resin dual damascene von Waeterloos, J.J., Shaffer, E.O., Stokich, T., Hetzner, J., Price, D., Booms, L., Donaton, R.A., Beyer, G., Coenegrachts, B., Caluwaerts, R., Struyf, H., Tokei, Z.S., Vervoort, I., Sijmus, B., Vos, I., Maex, K., Komiya, T., Iwashita, M.

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