Responding to the Challenge: Materials Design for Immersion Lithography von Padmanaban, Munirathna, Romano, Andrew, Lin, Guanyang, Chiu, Simon, Timko, Allen, Houlihan, Frank, Rahman, Dalil, Dammel, Ralph R., Turnquest, Karen, Rich, Georgia, Shuetter, Scott D., Shedd, Timonthy A., Nellis, Gregory A.

Volltext

Effect of Amine Additives on LWR and LER as Studied by Extraction Parameters von Houlihan, Francis M., Rentkiewicz, David, Lin, Guanyang, Rahman, Dalil, Mackenzie, Dougls, Timko, Allen, Kudo, Takanori, Anyadiegwu, Clement, Thiyqarqjan, Muthiah, Chiu, Simon, Romano, Andrew, Dammel, Rqlph R., Padmanaban, Murirathna

Volltext

Advances in Resist Materials for 193 nm Lithography von Bowden, Murrae J., Gabor, Allen H., Dimov, Ognian, Medina, Arturo N., Foster, Patrick, Steinhäusler, Thomas, Biafore, John J., Spaziano, Gregory, Slater, Sydney G., Blakeney, Andrew J., Neisser, Mark O., Houlihan, Frank M., Cirelli, Ray A., Dabbagh, Gary, Hutton, Richard S., Rushkin, Ilya L., Sweeney, James R., Timko, Allen G., Nalamasu, Om, Reichmanis, Elsa

Volltext

Advances in Resist Materials for 193nm Lithography von Bowden, Murrae J., Gabor, Allen H., Dimov, Ognian, Medina, Arturo N., Foster, Patrick, Steinhäusler, Thomas, Biafore, John J., Spaziano, Gregory, Slater, Sydney G., Blakeney, Andrew J., Neisser, Mark O., Houlihan, Frank M., Cirelli, Ray A., Dabbagh, Gary, Hutton, Richard S., Rushkin, Ilya L., Sweeney, James R., Timko, Allen G., Nalamasu, Om, Reichmanis, Elsa

Volltext

AN OVERVIEW OF RESIST PROCESSING FOR DEEP-UV LITHOGRAPHY von NALAMASU, OMKARAM, CHENG, MAY, TIMKO, ALLEN G., POL, VICTOR, REICHMANIS, ELSA, THOMPSON, LARRY F.

Volltext

Responding to the Challenge von Padmanaban, Munirathna, Romano, Andrew, Lin, Guanyang, Chiu, Simon, Timko, Allen, Houlihan, Frank, Rahman, Dalil, R. Dammel, Ralph, Turnquest, Karen, Rich, Georgia, D. Shuetter, Scott, A. Shedd, Timonthy, A. Nellis, Gregory

Volltext

Antireflective coating composition von TIMKO ALLEN G, MCKENZIE DOUGLAS, ABDALLAH DAVID, RAHMAN M. DALIL

Volltext bestellen

Antireflective coating composition von McKenzie, Douglas, Abdallah, David, Timko, Allen G, Rahman, M. Dalil

Volltext bestellen

AN ANTIREFLECTIVE COATING COMPOSITION von TIMKO, ALLEN, G, RAHMAN, M., DALIL, ABDALLAH, DAVID, MCKENZIE, DOUGLAS

Volltext bestellen

AN ANTIREFLECTIVE COATING COMPOSITION von TIMKO, ALLEN, G, RAHMAN, M., DALIL, ABDALLAH, DAVID, MCKENZIE, DOUGLAS

Volltext bestellen

Antireflective coating composition von TIMKO ALLEN G, MCKENZIE DOUGLAS, ABDALLAH DAVID, RAHMAN M. DALIL

Volltext bestellen

A PROCESS FOR IMAGING A PHOTORESIST COATED OVER AN ANTIREFLECTIVE COATING von DIOSES, ALBERTO, D, TIMKO, ALLEN, G, ABDALLAH, DAVID, ZHANG, RUZHI

Volltext bestellen

Process for Imaging a Photoresist Coated over an Antireflective Coating von TIMKO ALLEN, ZHANG RUZHI, DIOSES ALBERTO, ABDALLAH DAVID

Volltext bestellen

Antireflective coating composition comprising fused aromatic rings von Houlihan, Francis, Abdallah, David, Rahman, M. Dalil, McKenzie, Douglas, Zhang, Ruzhi, Timko, Allen G, Kim, WooKyu, Lu, Ping-Hung

Volltext bestellen

AN ANTIREFLECTIVE COATING COMPOSITION COMPRISING FUSED AROMATIC RINGS von TIMKO, ALLEN, G, RAHMAN, M., DALIL, ABDALLAH, DAVID, HOULIHAN, FRANCIS, ZHANG, RUZHI, LU, PING-HUNG, MCKENZIE, DOUGLAS, KIM, WOOKYU

Volltext bestellen

Antireflective coating composition comprising fused aromatic rings von LU PING-HUNG, HOULIHAN FRANCIS, TIMKO ALLEN G, MCKENZIE DOUGLAS, ZHANG RUZHI, KIM WOOKYU, ABDALLAH DAVID, RAHMAN M. DALIL

Volltext bestellen

AN ANTIREFLECTIVE COATING COMPOSITION COMPRISING FUSED AROMATIC RINGS von TIMKO, ALLEN, G, RAHMAN, M., DALIL, ABDALLAH, DAVID, HOULIHAN, FRANCIS, ZHANG, RUZHI, LU, PING-HUNG, MCKENZIE, DOUGLAS, KIM, WOOKYU

Volltext bestellen

Process for device fabrication in which the size of lithographically produced features is subsequently reduced von Frackoviak, John, Blatchford, James, Luce, Roscoe, Nalamasu, Omkaram, Timko, Allen

Volltext bestellen

An antireflective coating composition von TIMKO ALLEN G, MCKENZIE DOUGLAS, ABDALLAH DAVID, RAHMAN M. DALIL

Volltext bestellen

AN ANTIREFLECTIVE COATING COMPOSITION COMPRISING FUSED AROMATIC RINGS von TIMKO, ALLEN, G, RAHMAN, M., DALIL, ABDALLAH, DAVID, HOULIHAN, FRANCIS, ZHANG, RUZHI, LU, PING-HUNG, MCKENZIE, DOUGLAS, KIM, WOOKYU

Volltext bestellen