Thin PSG Process for 4H-SiC MOSFET von Jennings, Michael R., Ahyi, Ayayi C., Williams, John, Dhar, Sarit, Xu, Yi, Thomas, Stpehen M., Modic, Aaron, Fisher, Craig, Sharma, Yogesh K., Mawby, Philip Andrew, Isaacs-Smith, Tamara, Granfukel, Eric, Feldman, Leonard C.

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