In silico design of a thermal atomic layer etch process of cobalt von Kondati Natarajan, Suresh, Nolan, Michael, Theofanis, Patrick, Mokhtarzadeh, Charles, Clendenning, Scott B.

Volltext

Non-adiabatic dynamics modeling framework for materials in extreme conditions von Xiao, Hai, Jaramillo-Botero, Andrés, Theofanis, Patrick L., Goddard, William A.

Volltext

Understanding β-Hydride Eliminations from Heteroatom Functional Groups von Theofanis, Patrick L, Goddard, William A

Volltext

Atomistic Modeling Approach for Predicting Association of Photoacid Generators in Extreme Ultraviolet Polymeric Photoresists von Prajwal, B.P., Blackwell, James M., Theofanis, Patrick, Escobedo, Fernando A.

Volltext

Mechanism of Thermal Atomic Layer Etch of W Metal Using Sequential Oxidation and Chlorination: A First-Principles Study von Kondati Natarajan, Suresh, Nolan, Michael, Theofanis, Patrick, Mokhtarzadeh, Charles, Clendenning, Scott B

Volltext

Ab initio analysis of nucleation reactions during tungsten atomic layer deposition on Si(100) and W(110) substrates von King, Mariah J., Theofanis, Patrick L., Lemaire, Paul C., Santiso, Erik E., Parsons, Gregory N.

Volltext

Orientational Preference in Multilayer Block Copolymer Nanomeshes with Respect to Layer-to-Layer Commensurability von Carpenter, Corinne L, Nicaise, Samuel, Theofanis, Patrick Lauren, Shykind, David, Berggren, Karl K, Delaney, Kris T, Fredrickson, Glenn H

Volltext

Adhesion Limits and Design Criteria for Nanorelays von Lin, Kevin L., Cross, Graham L. W., Gleeson, Peter, de Silva, Johann P., Levander, Alejandro, Munoz, Jorge A., Pawashe, Chytra, Potie, Alexis, Theofanis, Patrick, Boland, John J., Kuhn, Kelin J.

Volltext

Large-scale Molecular Simulations of Hypervelocity Impact of Materials von Jaramillo-Botero, Andres, An, Qi, Theofanis, Patrick L., Goddard, William A.

Volltext

EUV patterning methods, structures, and materials von Zaccheo, Brian, Robinson, Michael, Gstrein, Florian, Blackwell, James, Doyle, Lauren, Krysak, Marie, Theofanis, Patrick

Volltext bestellen

Chain scission resist compositions for EUV lithography applications von Han, Eungnak, Blackwell, James, Doyle, Lauren, Krysak, Marie, Theofanis, Patrick

Volltext bestellen

CHAIN SCISSION RESIST COMPOSITIONS FOR EUV LITHOGRAPHY APPLICATIONS von Han, Eungnak, Blackwell, James, Doyle, Lauren, Krysak, Marie, Theofanis, Patrick

Volltext bestellen

PRECURSORS AND METHODS FOR PRODUCING TIN-BASED PHOTORESIST von Robinson, Michael, Semproni, Scott, Doyle, Lauren Elizabeth, Blackwell, James, Mokhtarzadeh, Charles Cameron, Meza-Morales, Paul, Krysak, Marie, Clendenning, Scott B, Mattson, Eric, Plombon, John J, Theofanis, Patrick

Volltext bestellen

INTEGRATED CIRCUIT von Zaccheo, Brian, Robinson, Michael, Gstrein, Florian, Blackwell, James, Doyle, Lauren, Krysak, Marie, Theofanis, Patrick

Volltext bestellen

EUV PATTERNING METHODS, STRUCTURES, AND MATERIALS von Zaccheo, Brian, Robinson, Michael, Gstrein, Florian, Blackwell, James, Doyle, Lauren, Krysak, Marie, Theofanis, Patrick

Volltext bestellen

Vertical interconnect methods for stacked device architectures using direct self assembly with high operational parallelization and improved scalability von Cea, Stephen M, Morrow, Patrick, Lilak, Aaron D, Theofanis, Patrick, Mehandru, Rishabh

Volltext bestellen

Vertically stacked devices with self-aligned regions formed by direct self assembly (DSA) processing von Cea, Stephen M, Lilak, Aaron D, Theofanis, Patrick, Weber, Cory E, Mehandru, Rishabh

Volltext bestellen

DIRECT SELF-ASSEMBLY PROCESS FOR FORMATION OF SELECTOR OR MEMORY LAYERS ON A VERTICAL RRAM MEMORY FOR LEAKAGE CURRENT MINIMIZATION von KENCKE, David L, LILAK, Aaron D, THEOFANIS, Patrick, KOTLYAR, Roza

Volltext bestellen

METHOD AND COMPOUND FOR CONTROLLING PATTERNING OF A RESIST MATERIAL von BRISTOL, Robert L, BLACKWELL, James M, THEOFANIS, Patrick, KRYSAK, Marie

Volltext bestellen

TRANSISTORS WITH MONOCRYSTALLINE METAL CHALCOGENIDE CHANNEL MATERIALS von Gosavi, Tanay, Lin, Chia-Ching, O'Brien, Kevin, Maxey, Kirby, Lee, Sudarat, Naylor, Carl, Metz, Matthew, Dorow, Chelsey, Penumatcha, Ashish Verma, Avci, Uygar, Theofanis, Patrick, Shivaraman, Shriram

Volltext bestellen