Micromachining of quartz plates: determination of a database by combined stereographic analysis and 3-D simulation of etching shapes von Tellier, C.R., Leblois, T.G.

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On the design of GaAs (hhl) resonant cantilevers von Tellier, C.R, Leblois, T.G.

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Micromachined resonant temperature sensors: theoretical and experimental results von Leblois, T.G., Tellier, C.R.

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Micromachining of GaAs structures with an acidic hydrogen peroxide solution von Tellier, C.R., Huve, G., Leblois, T.G.

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Etch pits on (hk0) and (hh${\sf \ell}$) silicon surfaces. Experimental shapes and simulations von Tellier, C. R.

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Characterization of the anisotropic chemical attack of ( h h l ) silicon plates in a TMAH 25 wt.% solution: micromachining and adequacy of the dissolution slowness surface von Tellier, C.R., Charbonnieras, A.R.

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A theoretical description of grain boundary electron scattering by an effective mean free path von Tellier, C.R.

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Micromachining of Quartz Plates : Determination of a Database by Combined Stereographic Analysis and 3D Simulation of Etching Shapes von Tellier, C.R., Leblois, T.

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Characterization of the anisotropic chemical attack of {hk0} silicon plates in a T.M.A.H. solution von Charbonnieras, A.R., Tellier, C.R.

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Some investigations on doubly-rotated quartz resonant temperature sensors von Leblois, T.G., Tellier, C.R.

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GaAs Non Resonant Micro-Sensors: Design and Simulations von Tellier, C.R., Durand, Stephane

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Some Investigations on Gallium Arsenide MEMS. Simulation of Microstructure Shapes von Leblois, Therese G., Tellier, C.R., Huve, G.

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Characterization of the anisotropic chemical attack of { hk0} silicon plates in a T.M.A.H. solution : Determination of a database von Charbonnieras, A.R., Tellier, C.R.

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A vectorial analysis for the numerical simulation of the surface profiles of etched singly-rotated quartz plates von Tellier, C.R., Vialle, N., Vaterkowski, J.L.

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Wet Etching of Si Micro-Arrays: Experimental and Theoretical Shapes von Leblois, Therese G., Tellier, C.R.

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Micromachining of ( hhl) silicon structures: experiments and 3D simulation of etched shapes von Tellier, C.R, Durand, S

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The Mayadas-Shatzkes conduction model treated as a Fuchs-Sondheimer model von Tellier, C.R., Tosser, A.J., Boutrit, C.

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ANISOTROPIC CHEMICAL ETCHING OF III-V CRYSTALS DISSOLUTION SLOWNESS SURFACE AND APPLICATION TO GaAs von TELLIER, C. R, HUVE, G, LEBLOIS, T. G

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Chemical etching of Y-rotated quartz plates: experiments and theoretical approach von Leblois, T., Tellier, C.R., Messaoudi, T.

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Approximate strain coefficients of metallic films deduced from an effective Fuchs-Sondheimer conduction model and from an effective relaxation time method von Tellier, C.R., Tosser, A.J.

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