Recent developments in electrical linewidth and overlay metrology for integrated circuit fabrication processes von CRESSWELL, M. W, SNIEGOWSKI, J. J, GHOSHTAGORE, R. N, ALLEN, R. A, GUTHRIE, W. F, GURNELL, A. W, LINHOLM, L. W, DIXSON, R. G, TEAGUE, E. C

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On measuring the root-mean-square value of a finite record length periodic waveform von TEAGUE, E. C

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Uncertainties in Calibrating a Stylus Type Surface Texture Measuring Instrument with an Interferometrically Measured Step von Teague, E Clayton

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Light Scattering from Manufactured Surfaces von Teague, E. Clayton, Vorburger, Theodore V., Maystre, Daniel, Young, R.D.

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ROOM TEMPERATURE GOLD-VACUUM-GOLD TUNNELING EXPERIMENTS von Teague, E.C.

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A new method to measure the distance between graduation lines on graduated scales von Penzes, W.B., Allen, R.A., Cresswell, M.W., Linholm, L.W., Teague, E.C.

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Piezodriven 50‐μm range stage with subnanometer resolution von Scire, Fredric E., Teague, E. Clayton

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Model calculations of fields related to near-field optical scanning of a silver strip on a glass substrate von MARX, E, TEAGUE, E. C

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Three-dimensional stylus profilometry von Teague, E.Clayton, Scire, Fredric E., Baker, Saul M., Jensen, Stephen W.

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Spatial RAM for high precision data acquisition systems von TEAGUE E. CLAYTON, WHEATLEY THOMAS

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New test structure for nanometer-level overlay and feature-placement metrology von Cresswell, M.W., Allen, R.A., Linholm, L.W., Ellenwood, C.H., Penzes, W.B., Teague, E.C.

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Para‐flex stage for microtopographic mapping von Teague, E. Clayton, Young, Russell D., Scire, Fredric, Gilsinn, David

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Sinusoidal profile precision roughness specimens von Teague, E.Clayton, Scire, Fredric E., Vorburger, Theodore V.

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Evaluation revision and application of the NBS stylus/computer system for the measurement of surface roughness / E. Clayton Teague ; Mechanics Division, Institute for Basic Standar... von Teague, E. Clayton

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INTEGRATED CIRCUITS FOR PORTABLE RADAR EQUIPMENT von Teague,E. Clayton

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Light Scattering from Manufactured Surfaces † † Contribution of the U.S. National Bureau of Standards, not subject to copyright von Teague, E. Clayton, Vorburger, Theodore V., Maystre, Daniel, Young, R.D.

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In-Process and On-Line Measurement of Surface Finish 1 1 Contribution of the U.S. National Bureau of Standards, not subject to copyright von Young, Russell D., Vorburger, Theodore V., Teague, E. Clayton

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In-Process and On-Line Measurement of Surface Finish 1 1Contribution of the U.S. National Bureau of Standards, not subject to copyright von Young, Russell D., Vorburger, Theodore V., Teague, E. Clayton

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Flexure hinge von SCIRE, FREDRIC E, TEAGUE, E. CLAYTON

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Electrical test structure and method for measuring the relative locations of conductive features on an insulating substrate von CRESSWELL, MICHAEL W, ALLEN, RICHARD A, TEAGUE, E. CLAYTON, PENZES, WILLIAM B, LINHOLM, LOREN W

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