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  1. 1
    Automated Detection of Lithography Defects as a Method of Quality Management for MEMS Elements

    Automated Detection of Lithography Defects as a Method of Quality Management for MEMS Elements von Zablotskaya, E. Yu, Rod, I.A., Tarenkin, A. I., Kazachkov, A.O., D. G., Shamiryan


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  2. 2
    DEVICE FOR PROTECTING STRUCTURE OF UNCOOLED THERMOSENSITIVE ELEMENT AND METHOD FOR PROTECTING STRUCTURE

    DEVICE FOR PROTECTING STRUCTURE OF UNCOOLED THERMOSENSITIVE ELEMENT AND METHOD FOR PROTECTING STRUCTURE von Shakhovtsev Mikhail Mikhailovich, Muratova Mariya Olegovna, Anchukov Konstantin Evgenevich, Tarenkin Andrey Ivanovich, Panin Dmitriy Ivanovich

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