MEMS reliability: Where are we now? von Tanner, D.M.

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Reliability of a MEMS torsional ratcheting actuator von Tanner, D.M., Walraven, J.A., Barnes, S.M., Smith, N.F., Bitsie, F., Swanson, S.E.

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Science-based MEMS reliability methodology von Tanner, D.M., Parson, T.B., Corwin, A.D., Walraven, J.A., Wittwer, J.W., Boyce, B.L., Winzer, S.R.

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The effect of frequency on the lifetime of a surface micromachined microengine driving a load von Tanner, D.M., Miller, W.M., Eaton, W.P., Irwin, L.W., Peterson, K.A., Dugger, M.T., Senft, D.C., Smith, N.F., Tangyunyong, P., Miller, S.L.

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Failure modes in surface micromachined microelectromechanical actuation systems von Miller, S.L, Rodgers, M.S, La Vigne, G, Sniegowski, J.J, Clews, P, Tanner, D.M, Peterson, K.A

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Accelerating aging failures in MEMS devices von Tanner, D.M., Walraven, J.A., Dugger, M.T., Parson, T.B., Candelaria, S.A., Jenkins, M.W., Corwin, A.D., Ohlhausen, J.A., Huffman, E.M.

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Reliability of surface micromachined MicroElectroMechanical actuators von Tanner, D.M.

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Non-destructive resonant frequency measurement on MEMS actuators von Smith, N.F., Tanner, D.M., Swanson, S.E., Miller, S.L.

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Pin-joint design effect on the reliability of a polysilicon microengine von Tanner, D.M., Walraven, J.A., Mani, S.S., Swanson, S.E.

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The effect of humidity on the reliability of a surface micromachined microengine von Tanner, D.M., Walraven, J.A., Irwin, L.W., Dugger, M.T., Smith, N.F., Eaton, W.P., Miller, W.M., Miller, S.L.

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2p-K-10 ^ C(^ O, α)反応における幅広いピーク構造の入射エネルギー依存性 von 村上, 哲也, E., Unglicht, Y.-W., Lui, 美原, 康雄, R.E., Neese, D.M., Tanner, R.E., Tribble, 高田, 栄一, 高橋, 令幸, 永谷, 郁夫

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MEMS reliability in shock environments von Tanner, D.M., Walraven, J.A., Helgesen, K., Irwin, L.W., Brown, F., Smith, N.F., Masters, N.

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MEMS reliability in a vibration environment von Tanner, D.M., Walraven, J.A., Helgesen, K.S., Irwin, L.W., Gregory, D.L., Stake, J.R., Smith, N.F.

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RECIPIENT von D.M. TANNER

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Failure modes in surface micromachined microelectromechanical actuators von Miller, S.L., Rodgers, M.S., LaVigne, G., Sniegowski, J.J., Clews, P., Tanner, D.M., Peterson, K.A.

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Observation of nuclear molecular resonances through the ( 16O, α) reaction on light nuclei von Takahashi, N., Yamaya, T., Tribble, R.E., Takada, E., Lui, Y.-W., Tanner, D.M., Nagatani, K.

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Energy dependence of the 12C( 16O, α) reaction von Murakami, T., Ungricht, E., Takahashi, N., Lui, Y.-W., Mihara, Y., Neese, R.E., Takada, E., Tanner, D.M., Tribble, R.E., Nagatani, K.

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Effect of W coating on microengine performance von Mani, S.S., Fleming, J.G., Walraven, J.A., Sniegowski, J.J., se Beer, M.P., Irwin, L.W., Tanner, D.M., LaVan, D.A., Dugger, M.T., Jakubczak, J., Miller, W.M.

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Self-stressing structures for wafer-level oxide breakdown to 200 MHz von Snyder, E.S., Tanner, D.M., Bowles, M.R., Swanson, S.E., Anderson, C.H., Perry, J.P.

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First observation of the (6Li,8He) reaction von Gagliardi, CA, Semon, DR, Takada, E, Tanner, DM, Tribble, RE

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