THIN-FILM METAL OXIDE SEMICONDUCTOR CAPACITOR von ALESHIN A.M, TARASOV S.V, KONONENKO V.I, KRASNOV V.A, TUZOVSKIJ K.A, ANDREEV V.M, SUSHKO B.I, TUZOVSKIJ A.M

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METHOD OF PRODUCING STANDARD MEASURE OF THICKNESS OF SEMICONDUCTOR LAYERS von OKSANICH A.P.,SU, SPEKTR S.A.,SU, TUZOVSKIJ A.M.,SU, SHAPOVAL V.YA.,SU, BABADZHANOV L.S.,SU

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Способ восстановления кремния von KHREBTISHSHEV V.G, MALOROSSIYANOV V.S, GUROVICH Z.L, BODROV A.D, TUZOVSKIJ A.M, KALINBET YA.D, POKROVSKIJ S.A

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