Ferroelectric properties of niobium-doped strontium bismuth tantalate films von Golosov, D. A., Zavadski, S. M., Kolos, V. V., Turtsevich, A. S.

Volltext

Effect of annealing on the charge–voltage characteristics of SrBi2(TaxNb1−x)2O9 films von Morozovsky, N.V., Semchenko, A.V., Sidsky, V.V., Kolos, V.V., Turtsevich, A.S., Eliseev, E.A., Morozovska, A.N.

Volltext

Technology Computer-Aided Design and Study of Prototypes of a Silicon Zener Diode von Dudar, N. L., Borzdov, V. M., Turtsevich, A. S.

Volltext

La3+-doped SrBi2Ta2O9 thin films for FRAM synthesized by sol-gel method von Sidsky, V.V., Semchenko, A.V., Rybakov, A.G., Kolos, V.V., Turtsevich, A.S., Asadchyi, A.N., Strek, W.

Volltext

La3＋-doped SrBi2Ta209 thin films for FRAM synthesized by sol-gel method von V.V. Sidsky A.V. Semchenko A.G. Rybakov V.V. Kolos A.S. Turtsevich A.N. Asadchyi W. Strek

Volltext

On the sol-gel synthesis of strontium-titanate thin films and the prospects of their use in electronics von Sohrabi Anaraki, H., Gaponenko, N. V., Rudenko, M. V., Guk, A. F., Zavadskij, S. M., Golosov, D. A., Kolosnitsyn, B. S., Kolos, V. V., Pyatlitskij, A. N., Turtsevich, A. S.

Volltext

Getter formation in silicon by implantation of antimony ions von Sadovskii, P. K., Chelyadinskii, A. R., Odzhaev, V. B., Tarasik, M. I., Turtsevich, A. S., Vasiliev, Yu. B.

Volltext

Identification of nickel silicide phases on a silicon surface from Raman spectra von Solodukha, V. A., Turtsevich, A. S., Solovyev, Ya. A., Sarychev, O. E., Gaponenko, S. V., Milchanin, O. V.

Volltext

The structure, morphology and resistivity of in situ phosphorus doped polysilicon films von Lesnikova, V.P, Turtsevich, A.S, Krasnitsky, V.Y, Emelyanov, V.A, Nalivaiko, O.Y, Kravtsov, S.V, Makarevich, T.V

Volltext

The effect of production conditions for in situ phosphorus-doped LPCVD polysilicon in monosilane/phosphine system on the deposition process kinetics von Turtsevich, A.S., Krasnitsky, V.Y., Emelyanov, V.A., Nalivaiko, O.Y., Kravtsov, S.V.

Volltext

Growth kinetics of low pressure chemically vapour deposited selective tungsten films in WF 6Si and WF 6H 2 systems von Turtsevich, A.S, Krasnitsky, V.Y, Granko, V.I, Lesnikova, V.P, Smal, I.V, Sarychev, O.E, Nalivaiko, O.Y, Kravtsov, S.V

Volltext

Growth kinetics of low pressure chemically vapour deposited selective tungsten films in WF6-Si and WF6-H2 systems von TURTSEVICH, A. S, KRASNITSKY, V. Y, GRANKO, V. I, LESNIKOVA, V. P, SMAL, I. V, SARYCHEV, O. E, NALIVAIKO, O. Y, KRAVTSOV, S. V

Volltext

METHOD FOR PRODUCING DOPED FILMS OF POLYCRYSTALLINE SILICON von KASTRITSKIJ L.V, LESNIKOVA V.P, TURTSEVICH A.S, KRASNITSKIJ V.N, NALIVAJKO O.YU

Volltext bestellen

COMPONENT INTERCONNECTION von Dovnar N.A, Turtsevich A.S, Malyshev V.S, Rodin G.F, Kozachonok G.M

Volltext bestellen

PROCESS OF FORMATION OF SILICON DIOXIDE FILMS von Krasnitskij V.Ja, Kozlov A.L, Dudarchik A.I, Turtsevich A.S, Kabakov M.M

Volltext bestellen

GAS MIXTURE FOR SELECTIVE DRY ETCHING OF INSULATING LAYERS von Krasnitskij V.Ja, Turtsevich A.S, Klimenkov V.V, Tsybul'ko I.A

Volltext bestellen

METHOD OF PRECIPITATION OF POLYCRYSTAL SILICONFILMS von Lesnikova V.P, Turtsevich A.S, Kravtsov S.V, Sarychev O.Eh, Makarevich I.I

Volltext bestellen

PLASMA-FORMING MIXTURE FOR PLASMA CHEMICAL TREATMENT OF PINOUT OF ALUMINIUM AND ITS ALLOYS IN MANUFACTURE OF VERY LARGE-SCALE INTEGRAL SCHEMES von Turtsevich A.S, Rodin G.F, Koreshkov G.A, Tsybul'ko I.A, Sasnovskij V.A

Volltext bestellen

INTERELEMENT CONNECTIONS OF INTEGRATED CIRCUITS von Dovnar N.A, Krasnitskij V.Ja, Turtsevich A.S, Khimko G.A, Vasilevich V.P

Volltext bestellen

METHOD FOR PRODUCING CAPACITOR PLATE FROM POLYCRYSTALLINE SILICON von Nalivajko O.Ju, Dovnar N.A, Bajanov A.S, Krasnitskij V.Ja, Turtsevich A.S, Rodin G.F

Volltext bestellen