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  1. 1
    HAFNIUM COMPOUND, HAFNIUM THIN FILM-FORMING MATERIAL AND METHOD FOR FORMING HAFNIUM THIN FILM

    HAFNIUM COMPOUND, HAFNIUM THIN FILM-FORMING MATERIAL AND METHOD FOR FORMING HAFNIUM THIN FILM von TAZUKE KIYOSHI, KIM, BYUNG SOO, TUBAKITANI AKIHITO, YOO, SEUNG HO, HIRAKI TADAAKI, MIHASHI SATORU

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  2. 2
    TWI415855B

    TWI415855B von TAZUKE KIYOSHI, KIM, BYUNG-SOO, TUBAKITANI AKIHITO, HIRAKI TADAAKI, MIHASHI SATORU, YOO, SEUNG-HO

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  3. 3
    Hafnium compound, hafnium thin film-forming material and method for forming hafnium thin film

    Hafnium compound, hafnium thin film-forming material and method for forming hafnium thin film von TAZUKE KIYOSHI, KIM BYUNG-SOO, YOO SEUNG-HO, TUBAKITANI AKIHITO, MIHASHI SATORU, HIRAKI TADAAKI

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  4. 4
    Hafnium compound, hafnium thin film-forming material and method for forming hafnium thin film

    Hafnium compound, hafnium thin film-forming material and method for forming hafnium thin film von TAZUKE KIYOSHI, TUBAKITANI AKIHITO, HIRAKI TADAAKI, MIHASHI SATORU

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  5. 5
    Hafnium compounds, hafnium containing thin film material and the method of producing thin film of the same

    Hafnium compounds, hafnium containing thin film material and the method of producing thin film of the same von HIRAKI, TADAAKI, TUBAKITANI, AKIHITO, KIM, BYUNG-SOO, TAZUKE, KIYOSHI, MIHASHI, SATORU, YOO, SEUNG-HO

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