Unlocking clean gas with hydrogen: A combustion optimization study von Aravindan, M., Praveen Kumar, G., Muthaiah, Rajmohan, Arulanandam, Madhan K., Sheoran, Neelam, Waykole, Nirmal, Sharma, Pawan, Anand, Asheesh, Kalidoss, Sudharsan, Trivedi, Gnyanesh

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PEDESTALS AND SHOWERHEADS INCLUDING DUAL PLENUM AND BAFFLE ARRANGEMENTS von LEE, James F, TRIVEDI, Gnyanesh Tushar, MAK, Joshua Nathaniel Eric, BOATRIGHT, Daniel

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PEDESTALS AND SHOWERHEADS INCLUDING CHANNELS WITH DECREASING FLOW VELOCITIES von TRIVEDI, Gnyanesh Tushar, LEE, James, MAK, Joshua Nathaniel Eric, BOATRIGHT, Daniel

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VALVE PULSING TO CONTROL PRECURSOR PRESSURE von Boochakravarthy, Ashwin Agathya, Paull, Ryan, Winkler, Jereld Lee, Ni, Chen, O'Reilly, Andrew, Trivedi, Gnyanesh

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REACTANT VAPOR DELIVERY SYSTEMS FOR SEMICONDUCTOR PROCESSING TOOLS AND METHODS von Huang, Jianqiu, Garg, Shubham, Bu, Yingzong, Phadnis, Akshay, Fitzgerald, Thomas, Trivedi, Gnyanesh, Ma, Paul

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GAS-PHASE REACTOR SYSTEM AND METHOD OF CLEANING SAME von Huang, Jianqiu, Dunn, Todd, Bu, Yingzong, Phadnis, Akshay, Fitzgerald, Thomas, Trivedi, Gnyanesh, Ma, Paul

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VALVE PULSING TO CONTROL PRECURSOR PRESSURE von O'REILLY ANDREW, LI CHEN, WINKLER JERELD LEE, PAULL RYAN, TRIVEDI GNYANESH, BOOCHAKRAVARTHY ASHWIN AGATHYA

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SHOWERHEAD ASSEMBLY AND COMPONENTS von Schmotzer, Michael, Olstad, Mark, Shero, Eric James, Terhorst, Herbert, Nandwana, Dinkar, Winkler, Jereld Lee, White, Carl Louis, Fondurulia, Kyle, Kimtee, Ankit, Petro, William George, Trivedi, Gnyanesh

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VALVE PULSING TO CONTROL PRECURSOR PRESSURE von JERELD LEE WINKLER, ANDREW O'REILLY, ASHWIN AGATHYA BOOCHAKRAVARTHY, GNYANESH TRIVEDI, NI CHEN, RYAN JOSEPH PAULL

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Reactant vapor delivery systems for semiconductor processing tools and methods von GARG, SHUBHAM, MA, PAUL, TRIVEDI, GNYANESH, BU, YINGZONG, FITZGERALD, THOMAS, PHADNIS, AKSHAY, HUANG, JIAN-QIU

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SYSTEM AND METHOD FOR DELIVERING REACTANT VAPOR FOR SEMICONDUCTOR PROCESSING TOOL von HUANG JIANQIU, PAUL MA, AKSHAY PHADNIS, GNYANESH TRIVEDI, THOMAS FITZGERALD, BU YINGZONG, SHUBHAM GARG

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REACTANT VAPOR DELIVERY SYSTEMS FOR SEMICONDUCTOR PROCESSING TOOLS AND METHODS von HUANG JIANQIU, FITZGERALD THOMAS, MA PAUL, BU YINGZONG, TRIVEDI GNYANESH, GARG SHUBHAM, PHADNIS AKSHAY

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Reactor system and method of cleaning same von MA, PAUL, TRIVEDI, GNYANESH, BU, YINGZONG, FITZGERALD, THOMAS, PHADNIS, AKSHAY, DUNN, TODD, HUANG, JIAN-QIU

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Gas-phase reactor system and method of cleaning same von HUANG JIANQIU, FITZGERALD THOMAS, MA PAUL, BU YINGZONG, TRIVEDI GNYANESH, DUNN TODD, PHADNIS AKSHAY

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SHOWERHEAD ASSEMBLY AND COMPONENTS von TERHORST HERBERT, NANDWANA DINKAR, WHITE CARL LOUIS, PETRO WILLIAM GEORGE, SHERO ERIC JAMES, TRIVEDI GNYANESH

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SHOWERHEAD ASSEMBLY AND COMPONENTS von NANDWANA DINKAR, WHITE CARL LOUIS, HERBERT TERHORST, GNYANESH TRIVEDI, PETRO WILLIAM GEORGE, SHERO ERIC JAMES

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