In Situ Evaluation of Drill Wear Using Tool Image Captured on Machining Center von Furuki, Tatsuya, Nagai, Tomoki, Nishigaki, Koichi, Suda, Takashi, Kousaka, Hiroyuki

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Recent EUV Resists toward High Volume Manufacturing von Nakagawa, Hisashi, Naruoka, Takehiko, Nagai, Tomoki

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Preface for Special Issue of Advanced Patterning Materials and Processes: Opportunities in Sub-10 nm Half Pitch Patterning and Beyond von Nagai, Tomoki, Watanabe, Takeo

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Novel EUV Photoresist for Sub-7 nm Node von Suzuki, Junya, Furukawa, Tsuyoshi, Miyata, Hiromu, Shiratani, Motohiro, Naruoka, Takehiko, Maruyama, Ken, Nakagawa, Hiroki, Nagai, Tomoki

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Novel High Sensitivity EUV Photoresist for Sub-7 nm Node von Nagai, Tomoki, Nakagawa, Hisashi, Naruoka, Takehiko, Dei, Satoshi, Tagawa, Seiichi, Oshima, Akihiro, Nagahara, Seiji, Shiraishi, Gosuke, Yoshihara, Kosuke, Terashita, Yuichi, Minekawa, Yukie, Buitrago, Elizabeth, Ekinci, Yasin, Yildirim, Oktay, Meeuwissen, Marieke, Hoefnagels, Rik, Rispens, Gijsbert, Verspaget, Coen, Maas, Raymond

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Directed Self Assembly Materials for Semiconductor Lithography von Minegishi, Shinya, Naruoka, Takehiko, Nagai, Tomoki

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Toward the Design of a Sequential Two Photon Photoacid Generator for Double Exposure Photolithography von O’Connor, Naphtali A, Berro, Adam J, Lancaster, Jeffrey R, Gu, Xinyu, Jockusch, Steffen, Nagai, Tomoki, Ogata, Toshiyuki, Lee, Saul, Zimmerman, Paul, Willson, C. Grant, Turro, Nicholas J

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Novel EUV Resist Development for Sub-14nm Half Pitch von Kimoto, Takakazu, Naruoka, Takehiko, Nakagawa, Hisashi, Fujisawa, Tomohisa, Shiratani, Motohiro, Nagai, Tomoki, Ayothi, Ramakrishnan, Hishiro, Yoshi, Hori, Masafumi, Hoshiko, Kenji, Kimura, Toru

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Development of Directed Self-Assembly Materials for Sub 10 nm Patterning von Komatsu, Hiroyuki, Hori, Masafumi, Minegishi, Shinya, Naruoka, Takehiko, Nagai, Tomoki

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Synthesis and ligand substitution reactions of a homoleptic acetonitrile dipalladium(i) complex von Murahashi, Tetsuro, Nagai, Tomoki, Okuno, Taketoshi, Matsutani, Teruo, Kurosawa, Hideo

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Directed Self Assembly Materials for Hole Patterning von Minegishi, Shinya, Anno, Yusuke, Namie, Yuji, Nagai, Tomoki

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Preparation of water-dispersible Janus nanosheets from K4Nb6O17·3H2O and their behaviour as a two-dimensional surfactant on air–water and water-toluene interfaces von Suzuki, Ryoko, Nagai, Tomoki, Onitsuka, Emika, Idota, Naokazu, Kunitake, Masashi, Nishimi, Taisei, Sugahara, Yoshiyuki

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Preparation of water-dispersible Janus nanosheets from K 4 Nb 6 O 17 ·3H 2 O and their behaviour as a two-dimensional surfactant on air-water and water-toluene interfaces von Suzuki, Ryoko, Nagai, Tomoki, Onitsuka, Emika, Idota, Naokazu, Kunitake, Masashi, Nishimi, Taisei, Sugahara, Yoshiyuki

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Novel EUV Resists Materials for 16nm HP and beyond von Sakai, Kazunori, Shiratani, Motohiro, Fujisawa, Tomohisa, Inukai, Koji, Sakai, Kaori, Maruyama, Ken, Hoshiko, Kenji, Ayothi, Ramakrishnan, Santos, Andreia, Naruoka, Takehiko, Nagai, Tomoki

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Directed Self Assembly Material Development for Fine Patterning and Pattern Repair von Minegishi, Shinya, Namie, Yuji, Izumi, Kenichi, Anno, Yusuke, Buch, Xavier, Naruoka, Takehiko, Hishiro, Yoshi, Nagai, Tomoki

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Dinuclear Addition of the Pd–Pd Moieties to 1,3-Dienes von Murahashi, Tetsuro, Nagai, Tomoki, Nakashima, Hiromitsu, Tomiyasu, Sadayuki, Kurosawa, Hideo

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Self-Consistent Field Theory of Directed Self-Assembly on CH Pitch Division von Tominaga, Tetsuo, Minegishi, Shinya, Komatsu, Hiroyuki, Naruoka, Takehiro, Nagai, Tomoki, Izumi, Kenichi, Fredrickson, Glenn H.

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Preface for Special Issue of Advanced Patterning Materials and Processes von Nagai, Tomoki, Watanabe, Takeo

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Generation of Oligoene Species Capped by Palladium(II) Moieties from a Dinuclear Palladium(I) Complex and Alkyne von Murahashi, Tetsuro, Okuno, Taketoshi, Nagai, Tomoki, Kurosawa, Hideo

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Stereoretentive Elimination and Trans-olefination of the Dicationic Dipalladium Moiety [Pd2L n ]2+ Bound on 1,3,5-Trienes von Murahashi, Tetsuro, Nakashima, Hiromitsu, Nagai, Tomoki, Mino, Yukari, Okuno, Taketoshi, Jalil, M. Abdul, Kurosawa, Hideo

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