REDUCED STRAIN Si/SiGe HETEROEPITAXY STACKS FOR 3D DRAM von MARGETIS, Joe, KITAJIMA, Tomohiko, FISHBURN, Fredrick David, TOLLE, John Byron, MOHAMMED, Abdul Wahab, LEE, Gill Yong, KIRSCHENHEITER, Thomas John, LIU, Patricia M, ZHU, Zuoming

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REDUCED STRAIN Si/SiGe HETEROEPITAXY STACKS FOR 3D DRAM von Margetis, Joe, Kitajima, Tomohiko, Liu, Patricia M, Zhu, Zuoming, Kirschenheiter, Thomas John, Tolle, John Byron, Lee, Gill Yong, Fishburn, Fredrick David, Mohammed, Abdul Wahab

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3D DRAM Si/SiGe REDUCED STRAIN Si/SiGe HETEROEPITAXY STACKS FOR 3D DRAM von KIRSCHENHEITER THOMAS JOHN, FISHBURN FREDRICK DAVID, TOLLE JOHN BYRON, LIU PATRICIA M, ZHU ZUOMING, LEE GILL YOUNG, MOHAMMED ABDUL WAHAB, KITAJIMA TOMOHIKO, MARGETIS JOE

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Reduced strain Si/SiGe heteroepitaxy stacks for 3D DRAM von LEE, GILL YONG, MARGETIS, JOE, FISHBURN, FREDRICK DAVID, TOLLE, JOHN BYRON, MOHAMMED, ABDUL WAHAB, KIRSCHENHEITER, THOMAS JOHN, ZHU, ZUOMING, KITAJIMA, TOMOHIKO, LIU, PATRICIA M

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3D DRAM Si/SiGe REDUCED STRAIN Si/SiGe HETEROEPITAXY STACKS FOR 3D DRAM von KIRSCHENHEITER THOMAS JOHN, FISHBURN FREDRICK DAVID, TOLLE JOHN BYRON, LIU PATRICIA M, ZHU ZUOMING, LEE GILL YOUNG, MOHAMMED ABDUL WAHAB, KITAJIMA TOMOHIKO, MARGETIS JOE

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