PI gain tuning for pressure-based MFCs with Gaussian mixture model von Higuchi, Seiji, Ueda, Takayuki, Takijiri, Kotaro, Hayashi, Daisuke

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Wafer Temperature Control Using Helium Pressure and Observer-Based Model Predictive Control von Hayashi, Daisuke, Takijiri, Kotaro, Ueda, Takayuki

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Pressure Control for Semiconductor Processes Based on Estimated Output Feedback von TAKIJIRI, Kotaro, OSUKA, Koichi, SUGIE, Toshiharu

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Proposal of Flow Split Controller and Control Parameter Optimization for Semiconductor Manufacturing Process von TAKIJIRI, Kotaro, OSUKA, Koichi, SUGIE, Toshiharu

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Compensation of Pressure Disturbance for Flow Control Equipment without Pressure Sensor by Disturbance Model and IMC von TAKIJIRI, Kotaro, SAKAI, Yukio, SUGIE, Toshiharu

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Multi-physical Domain Modeling of Constant Temperature Flow Sensor von TAKIJIRI, Kotaro, SAKAI, Yukio, SUGIE, Toshiharu

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Pressure Control for Semiconductor Processes Based on Estimated Output Feedback von TAKIJIRI, Kotaro, OSUKA, Koichi, SUGIE, Toshiharu

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CONCENTRATION CONTROL DEVICE, RAW MATERIAL VAPORIZATION SYSTEM, CONCENTRATION CONTROL METHOD, AND RECORDING MEDIUM STORING CONCENTRATION CONTROL PROGRAM von TAKIJIRI, Kotaro

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Multi-physical Domain Modeling of Constant Temperature Flow Sensor von TAKIJIRI, Kotaro, SAKAI, Yukio, SUGIE, Toshiharu

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WAFER TEMPERATURE CONTROL DEVICE, WAFER TEMPERATURE CONTROL METHOD AND WAFER TEMPERATURE CONTROL PROGRAM von HAYASHI, Daisuke, TAKIJIRI, Kotaro

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WAFER TEMPERATURE CONTROL DEVICE, WAFER TEMPERATURE CONTROL METHOD, AND WAFER TEMPERATURE CONTROL PROGRAM von HAYASHI, Daisuke, TAKIJIRI, Kotaro

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WAFER TEMPERATURE CONTROL DEVICE, WAFER TEMPERATURE CONTROL METHOD, AND WAFER TEMPERATURE CONTROL PROGRAM von HAYASHI, Daisuke, TAKIJIRI, Kotaro

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Concentration control system, concentration control method and program for a concentration control system von Takijiri, Kotaro, Takamune, Ojiro

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CONCENTRATION CONTROL DEVICE RAW MATERIAL VAPORIZATION SYSTEM CONCENTRATION CONTROL METHOD AND RECORDING MEDIUM STORING CONCENTRATION CONTROL PROGRAM von TAKIJIRI KOTARO

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Concentration control device, raw material gasification system, concentration control method, and storage medium storing concentration control program von TAKIJIRI, KOTARO

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FLOW RATE CONTROL APPARATUS, FLOW RATE CONTROL METHOD, AND PROGRAM RECORDING MEDIUM IN WHICH PROGRAM FOR FLOW RATE CONTROL APPARATUS IS RECORDED von TOKUNAGA, Kazuya, TAKIJIRI, Kotaro

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CONCENTRATION CONTROL SYSTEM, CONCENTRATION CONTROL METHOD AND PROGRAM FOR A CONCENTRATION CONTROL SYSTEM von Takijiri, Kotaro, Takamune, Ojiro

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半導体製造プロセスの出力推定値フィードバックによる圧力制御 von 瀧尻, 興太郎, 大須賀, 公一, 杉江, 俊治

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半導体製造プロセスにおける流量分岐制御系の提案と最適設計 von 瀧尻, 興太郎, 大須賀, 公一, 杉江, 俊治

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FLUID CONTROLLER, FLUID CONTROL METHOD, AND FLUID CONTROLLER PROGRAM von TAKIJIRI KOTARO

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