Fundamental Investigations in the Design of Five-Axis Nanopositioning Machines for Measurement and Fabrication Purposes von Schienbein, Ralf, Fern, Florian, Theska, René, Supreeti, Shraddha, Füßl, Roland, Manske, Eberhard

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High‐resolution patterning on LTCC by transfer of photolithography‐based metallic microstructures von Supreeti, Shraddha, Fischer, Michael, Fritz, Mathias, Müller, Jens

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Mix-and-match lithography and cryogenic etching for NIL template fabrication von Hofmann, Martin, Weidenfeller, Laura, Supreeti, Shraddha, Mechold, Stephan, Holz, Mathias, Reuter, Christoph, Sinzinger, Stefan, Manske, Eberhard, Rangelow, Ivo W.

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Cryogenic etching for pattern transfer into silicon of Mix-and-Match structured resist layers von Weidenfeller, Laura, Hofmann, Martin, Supreeti, Shraddha, Mechold, Stephan, Holz, Mathias, Reuter, Christoph, Manske, Eberhard, Rangelow, Ivo W.

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Correction: Fundamental Investigations in the Design of Five-Axis Nanopositioning Machines for Measurement and Fabrication Purposes von Schienbein, Ralf, Fern, Florian, Theska, René, Supreeti, Shraddha, Füßl, Roland, Manske, Eberhard

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Development and Implementation of a Rotating Nanoimprint Lithography Tool for Orthogonal Imprinting on Edges of Curved Surfaces von Supreeti, Shraddha, Schienbein, Ralf, Feßer, Patrick, Fern, Florian, Hoffmann, Martin, Sinzinger, Stefan

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Tip- and Laser-based 3D Nanofabrication in Extended Macroscopic Working Areas von Ortlepp, Ingo, Fröhlich, Thomas, Füßl, Roland, Reger, Johann, Schäffel, Christoph, Sinzinger, Stefan, Strehle, Steffen, Theska, René, Zentner, Lena, Zöllner, Jens-Peter, Rangelow, Ivo W., Reinhardt, Carsten, Hausotte, Tino, Cao, Xinrui, Dannberg, Oliver, Fern, Florian, Fischer, David, Gorges, Stephan, Hofmann, Martin, Kirchner, Johannes, Meister, Andreas, Sasiuk, Taras, Schienbein, Ralf, Supreeti, Shraddha, Mohr-Weidenfeller, Laura, Weise, Christoph, Reuter, Christoph, Stauffenberg, Jaqueline, Manske, Eberhard

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i-FPS - Kompakte, performante und hoch-integrierte Faint Pulse Source bei 850 nm; Teilvorhaben: E/O-Hardware-Plattform für Faint Pulse Sources : Abschlussbericht FKZ: 50 YH 2121 :... von Müller, Jens, Hein, Matthias, Supreeti, Shraddha, Stehr, Uwe

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