Reliable matching of 300 mm defect inspection tools @ sub 60 nm defect size von Nutsch, A., Supplieth, F., Pfitzner, L., Ryssel, H.

Volltext

Deposition of aluminium nitride films by electron cyclotron resonance plasma-enhanced chemical vapour deposition von Ecke, G., Eichhorn, G., Pezoldt, J., Reinhold, C., Stauden, T., Supplieth, F.

Volltext

Detection and review of crystal originated surface and sub surface defects on bare silicon von Nutsch, A., Funakoshi, T., Pfitzner, L., Steffen, R., Supplieth, F., Ryssel, H.

Volltext

Deposition of aluminium nitride films by electron cyclotron resonance plasma-enhanced chemical vapour depositon von Stauden, T, Ecke, G, Eichhorn, G, Pezoldt, J, Reinhold, C, Supplieth, F

Volltext

Deposition of aluminium nitride films by electron cyclotron resonance plasma-enhanced chemical vapour depositon von Stauden, T, Ecke, G, Eichhorn, G, Pezoldt, J, Reinhold, C, Supplieth, F

Volltext