Novel Approaches to Extend 193nm Immersion Technology to Advanced Device Nodes von Cameron, James, Li, Mingqi, Liu, Cong, Sung, Jin Wuk, Xu, Cheng Bai

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Optimization of Polymer-bound PAG (PBP) for 20nm EUV Lithography von Thackeray, James W., Jain, Vipul Jain, Coley, Suzanne, Christianson, Matthew, Arriola, Daniel, LaBeaume, Paul, Kang, Su-Jin, Wagner, Mike, Sung, Jin Wuk, Cameron, Jim

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A New Breed of Wet-Developable BARC Materials von Vyklicky, Libor, Huang, Wu-Song, Popova, Irene, Varanasi, Pushkara Rao, Cameron, James, Amara, Johan, Sung, Jin Wuk, Valeri, David, Prokopowicz, Greg, Ware, Adam, O'Connell, Kathleen, Desisto, Jason, Vohra, Vaishali, O'Shea, Kevin, Barclay, George, Yamamoto, Yoshihiro, Kurihara, Tomoki, Hidano, Manabu

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A concise synthesis of the sex pheromone of Phtheochroa cranaodes (Lepidoptera: Tortricidae) von Park, Chan Pil, Gil, Jun Mo, Sung, Jin Wuk, Oh, Dong Young

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Stereoselective synthesis of ketene telluroacetals via hydrozirconation of acetylenic tellurides von Sung, Jin Wuk, Park, Chan Pil, Gil, Jun Mo, Oh, Dong Young

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First example of 1,1-bimetalloalkenes of tellurium and zirconium: Application for stereoselective preparation of (Z)-α-organotelluro-α,β-unsaturated carbonyl compounds von Sung, Jin Wuk, Jang, Won Bum, Oh, Dong Young

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Coating compositions suitable for use with an overcoated photoresist von Amara, John P, Cameron, James F, Sung, Jin Wuk, Prokopowicz, Gregory P

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Substrates coated with an antireflective composition and a photoresist von Amara, John P, Cameron, James F, Valei, David A, Sung, Jin Wuk, Prokopowicz, Gregory P

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Block copolymers and pattern treatment compositions and methods von Jain, Vipul, Li, Mingqi, Zhou, Huaxing, Hustad, Phillip D, Trefonas, III, Peter, Sung, Jin Wuk

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Stereoselective Synthesis of 1,1-Bimetalloalkenes of Tin and Selenium, Tin and Tellurium von Park, Chan Pil, Sung, Jin Wuk, Oh, Dong Young

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METHOD OF NEGATIVE TONE DEVELOPMENT USING A COPOLYMER MULTILAYER ELECTROLYTE AND ARTICLES MADE THEREFROM von Jain Vipul, Park Jong, Zhang Jieqian, Hustad Phillip D, Sung Jin Wuk

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METHOD OF NEGATIVE TONE DEVELOPMENT USING A COPOLYMER MULTILAYER ELECTROLYTE AND ARTICLES MADE THEREFROM von Jain Vipul, Park Jong, Zhang Jieqian, Hustad Phillip D, Sung Jin Wuk

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Pattern treatment methods von Jain, Vipul, Li, Mingqi, Kaitz, Joshua A, Wu, Chunyi, Hustad, Phillip D, Sung, Jin Wuk, Park, Jong Keun

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COATING COMPOSITIONS SUITABLE FOR USE WITH AN OVERCOATED PHOTORESIST von Cameron James F, Prokopowicz Gregory P, Amara John P, Sung Jin Wuk

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Coating compositions suitable for use with an overcoated photoresist von Cameron James F, Prokopowicz Gregory P, Amara John P, Sung Jin Wuk

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One-Pot Synthesis of 1-Alkynylphosphonates von Gil, Jun Mo, Sung, Jin Wuk, Park, Chan Pil, Oh, Dong Young

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Compositions and methods for pattern treatment von Park Jong Keun, Jain Vipul, Li Mingqi, Zhou Huaxing, Hustad Phillip D, Sung Jin Wuk

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COATING COMPOSITIONS SUITABLE FOR USE WITH AN OVERCOATED PHOTORESIST von Cameron James F, Prokopowicz Gregory P, Amara John P, Valeri David A, Sung Jin Wuk

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PATTERN TREATMENT METHODS von Park Jong Keun, Li Mingqi, Jain Vipul, Zhou Huaxing, Hustad Phillip D, Sung Jin Wuk

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COMPOSITIONS AND METHODS FOR PATTERN TREATMENT von Park Jong Keun, Jain Vipul, Li Mingqi, Zhou Huaxing, Hustad Phillip D, Sung Jin Wuk

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