Measurement of the divergence angle of the electron microprobe of a scanning electron microscope von Novikov, Yu. A., Rakov, A. V., Stekolin, I. Yu

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Accuracy in calibrating electron microscopes with silicon slot structures von Novikov, Yu. A., Stekolin, I. Yu

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Scanning electron microscope calibration with input data checking von Novikov, Yu. A., Rakov, A. V., Stekolin, I. Yu

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Measuring the diameter of an electron probe with a scanning electron microscope von Novikov, Yu. A., Rakov, A. V., Stekolin, I. Yu

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Calibration of REM with elimination of systematic linear-gauge error von Novikov, Yu. A., Rakov, A. V., Stekolin, I. Yu

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Measurement of linear dimensions of submicron structures with a scanning electron microscope von Danilov, V. A., Novikov, Yu. A., Rakov, A. V., Stekolin, I. Yu

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Calibration of scanning electron microscopes by means of pitch structures von Novikov, Yu. A., Rakov, A. V., Stekolin, I. Yu

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Calibrating a scanning electron microscope by means of a linear measure having one certified dimension von Novikov, Yu. A., Rakov, A. V., Stekolin, I. Yu

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Scanning electron microscope calibration with simultaneous electron probe diameter determination von Novikov, Yu. A., Rakov, A. V., Stekolin, I. Yu, Strizhkov, I. B.

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SEM Measurement of the linear dimensions of relief submicron structures by the method of ?invariant? points von Danilov, V. A., Novikov, Yu. A., Rakov, A. V., Stekolin, I. Yu

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Determination of the diameter of the electron probe of a scanning electron microscope von Novikov, Yu. A., Rakov, A. V., Stekolin, I. Yu, Strizhkov, I. B.

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Calibration of scanning electron microscopes for measuring the dimensions of submicron relief elements von Novikov, Yu. A., Peshekhonov, S. V., Rakov, A. V., Simonov, A. N., Stekolin, I. Yu, Strizhkov, I. B., Tsybul'skii, V. V.

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