Detection and titration of ozone using metallophthalocyanine based field effect transistors von Bouvet, M, Leroy, A, Simon, J, Tournilhac, F, Guillaud, G, Lessnick, P, Maillard, A, Spirkovitch, S, Debliquy, M, de Haan, A, Decroly, A

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A new technique for the fabrication of thin silicon radiation detectors von Foulon, F., Rousseau, L., Babadjian, L., Spirkovitch, S., Brambilla, A., Bergonzo, P.

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A new condenser microphone with a p + silicon membrane von Bourouina, T., Spirkovitch, S., Baillieu, F., Vauge, C.

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Phthalocyanine-based field-effect transistor as ozone sensor von Bouvet, Marcel, Guillaud, Gérard, Leroy, Arnaud, Maillard, André, Spirkovitch, Serge, Tournilhac, François-Genès

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Preliminary results on a silicon gyrometer based on acoustic mode coupling in small cavities von Bourouina, T., Exertier, A., Spirkovitch, S., Chaumet, B., Pleska, E.

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Integrated magnetic field sensor von Donzier, E., Lefort, O., Spirkovitch, S., Baillieu, F.

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Silicon etching techniques and application to mechanical devices von Bourouina, T., Spirkovitch, S., Marty, F., Baillieu, F., Donzier, E.

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Finite-element analysis of rotor stability in an axial-drive micromotor von Milne, N G, Beerschwinger, U, Yang, S J, Reuben, R L, Mathieson, D, Ziad, H, Spirkovitch, S

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Silicon Bulk Machining of Electrostatic Micromotors Fabrication and Potential Applications von Ziad, H., Bounhir, A., Spirkovitch, S., Baillieu, F., Bourouina, T., Marty, L., Rigo, S., L'hoir, A.

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Bias dependent etching of polysilicon mixed monocrystalline-polycrystalline silicon structures von Riou, J.C., Spirkovitch, S., Sangouard, P., Baillieu, B.

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A CMOS, self-biased charge amplifier von Amendola, G., Blanchard, Y., Exertier, A., Spirkovitch, S., Lu, G., Alquie, G.

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A new technique for the fabrication of thin silicon radiation detectors von Foulon, F., Rousseau, L., Babadjian, L., Spirkovitch, S., Brambilla, A., Bergonzo, P.

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BioMEA™: A versatile high-density 3D microelectrode array system using integrated electronics von Charvet, Guillaume, Rousseau, Lionel, Billoint, Olivier, Gharbi, Sadok, Rostaing, Jean-Pierre, Joucla, Sébastien, Trevisiol, Michel, Bourgerette, Alain, Chauvet, Philippe, Moulin, Céline, Goy, François, Mercier, Bruno, Colin, Mikael, Spirkovitch, Serge, Fanet, Hervé, Meyrand, Pierre, Guillemaud, Régis, Yvert, Blaise

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ULTRADÜNNER DETEKTOR FÜR IONISIERENDE STRAHLUNG UND VERFAHREN ZUR HERSTELLUNG von BABADJIAN, LIONEL, FOULON, FRANCOIS, SPIRKOVITCH, SERGE

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ULTRA-THIN IONISING RADIATION DETECTOR AND METHODS FOR MAKING SAME von BABADJIAN, LIONEL, FOULON, FRANCOIS, SPIRKOVITCH, SERGE

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Ultra-thin ionizing radiation detector and methods for making same von FOULON FRANCOIS, SPIRKOVITCH SERGE, BABADJIAN LIONEL

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ULTRA-THIN IONISING RADIATION DETECTOR AND METHODS FOR MAKING SAME von BABADJIAN, LIONEL, FOULON, FRANCOIS, SPIRKOVITCH, SERGE

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Mirror with deformable membrane von BABADJIAN, LIONEL, COVILLE, ARNAUD, CAREL, JEAN-LOUIS, GILLES, ROBERT, HERRIAU, JEAN-PIERRE, SPIRKOVITCH, SERGE

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Micromagnetometer with capacitive detection von THOMAS, ISABELLE, BAILLIEU, FRANCOIS, DONZIER, ERIC, SPIRKOVITCH, SERGE

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Micromagnetometer with flexible bar von THOMAS, ISABELLE, BAILLIEU, FRANCOIS, DONZIER, ERIC, SPIRKOVITCH, SERGE

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