Silicon waveguide sidewall smoothing by wet chemical oxidation von Sparacin, D.K., Spector, S.J., Kimerling, L.C.

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Demonstration of a Fourth-Order Pole-Zero Optical Filter Integrated Using CMOS Processes von Rasras, M.S., Gill, D.M., Patel, S.S., Kun-Yii Tu, Young-Kai Chen, White, A.E., Pomerene, A.T.S., Carothers, D.N., Grove, M.J., Sparacin, D.K., Michel, J., Beals, M.A., Kimerling, L.C.

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Trimming of silicon nitride microring resonators with a polysilane top cladding von Sparacin, D.K., Lock, J.P., Ching-yin Hong, Gleason, K.K., Kimerling, L.C., Michel, J.

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