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    High-resolution shadow-mask patterning in deep holes and its application to an electrical wafer feed-through

    High-resolution shadow-mask patterning in deep holes and its application to an electrical wafer feed-through von Burger, G.J, Smulders, E.J.T, Berenschot, J.W, Lammerink, T.S.J, Fluitman, J.H.J, Imai, S


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  2. 2
    High Resolution Shadow Mask Patterning In Deep Holes And Its Application To An Electrical Wafer Feed-through

    High Resolution Shadow Mask Patterning In Deep Holes And Its Application To An Electrical Wafer Feed-through von Burger, G.J., Smulders, E.J.T., Berenschot, J.W., Lammerink, T.S.J., Fluitman, J.H.J., Imai, S.

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