Studies of the micromorphology of sputtered TiN thin films by autocorrelation techniques von Smagoń, Kamil, Stach, Sebastian, Ţălu, Ştefan, Arman, Ali, Achour, Amine, Luna, Carlos, Ghobadi, Nader, Mardani, Mohsen, Hafezi, Fatemeh, Ahmadpourian, Azin, Ganji, Mohsen, Grayeli Korpi, Alireza

Volltext