X-ray and infrared spectroscopy of layers produced by cosputtering of spatially separated Si[O.sub.2] and Si sources von Shamin, S.N, Galakhov, V.R, Aksenova, V.I, Karpov, A.N, Shvartz, N.L, Yanovitskaya, Z. Sh, Volodin, V.A, Antonova, I.V, Ezhevskaya, T.B, Jedrzejewski, J, Savir, E, Balberg, I

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