Diffraction-enhanced beam-focusing for X-rays in curved multi-plate crystal cavity von Chang, Y-Y, Chen, S-Y, Wu, H-H, Weng, S-C, Chu, C-H, Lee, Y-R, Tang, M-T, Stetsko, Yu, Shew, B-Y, Yabashi, M, Chang, S-L

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UV-LIGA interferometer biosensor based on the SU-8 optical waveguide von Shew, B.Y., Kuo, C.H., Huang, Y.C., Tsai, Y.H.

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E-beam lithography and electrodeposition fabrication of thick nanostructured devices von Lo, T N, Chen, Y T, Chiu, C W, Liu, C J, Wu, S R, Lin, I K, Su, C I, Chang, W D, Hwu, Y, Shew, B Y, Chiang, C C, Je, J H, Margaritondo, G

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Fabrication of support structures to prevent SU-8 stiction in high aspect ratio structures von VORA, K. D, PEELE, A. G, SHEW, B.-Y, HARVEY, E. C, HAYES, J. P

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Monolithic SU-8 micro-interferometer for biochemical detections von Shew, B.Y., Cheng, Y.C., Tsai, Y.H.

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Crystal cavity resonance for hard x rays: A diffraction experiment von Chang, S.-L., Stetsko, Yu. P., Tang, M.-T., Lee, Y.-R., Sun, W.-H., Yabashi, M., Ishikawa, T., Wu, H.-H., Shew, B.-Y., Lin, Y.-H., Kuo, T.-T., Tamasaku, K., Miwa, D., Chen, S.-Y., Chang, Y.-Y., Shy, J.-T.

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Specification of mechanical support structures to prevent SU-8 stiction in high aspect ratio structures von Vora, K D, Shew, B Y, Harvey, E C, Hayes, J P, Peele, A G

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Sidewall slopes of SU-8 HARMST using deep x-ray lithography von Vora, K D, Shew, B Y, Harvey, E C, Hayes, J P, Peele, A G

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Production issues for high aspect ratio lobster-eye optics using LIGA von PEELE, A. G, VORA, K. D, SHEW, B.-Y, LOECHL, B, HARVEY, E. C, HAYES, J. P

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Effects of Aluminum Concentration on the Oxidation Behaviors of Reactively Sputtered TiAlN Films von Huang, Jow-Lay, Shew, Bor-Yuan

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Sidewall slopes and roughness of SU-8 HARMST von Vora, K. D., Shew, B.-Y., Lochel, B., Harvey, E. C., Hayes, J. P., Peele, A. G.

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X-ray microfabrication and measurement of a terahertz mode converter von Chang, T. H., Shew, B. Y., Wu, C. Y., Chen, N. C.

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Ultra-deep LIGA process von Cheng, Y, Shew, B-Y, Lin, C-Y, Wei, D-H, Chyu, M K

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Enhancement of specific cell-capture efficiency using a reversible dielectrophoresis field von Shew, B.Y., Chu, H.C., Chen, C.K., Su, Y.C., Hsieh, Y.H., Lai, L.J., Liu, S.J., Leng, C.H.

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Millimeter-wave Bragg diffraction of microfabricated crystal structures von Yuan, C. P., Lin, S. Y., Chang, T. H., Shew, B. Y.

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Concepts for creating ultra-deep trenches using deep X-ray lithography von Cheng, Y., Shew, B.-Y., Lin, C.-H., Chyu, M.K.

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Overcoming SU-8 stiction in high aspect ratio structures von PEELE, A. G, SHEW, B. Y, VORA, K. D, LI, H. C

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Ultra-deep LIGA process and its applications von Cheng, Y., Shew, B.-Y., Chyu, M.K., Chen, P.H.

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Investigation of the flow characteristics within a micronozzle/diffuser von Yang, Kai-Shing, Chen, Ing-Young, Shew, Bor-Yuan, Wang, Chi-Chuan

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Sidewall slopes and roughness of SU-8 HARMST von Vora, K. D., Shew, B.-Y., Lochel, B., Harvey, E. C., Hayes, J. P., Peele, A. G.

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