ATTENUATED TOTAL REFLECTION SPECTRA OF NITRIDED Si[O.sub.2]/Si STRUCTURES von Odzhaev, V.B, Pyatlitski, A.N, Prosolovich, V.S, Kovalchuk, N.S, Soloviev, Ya. A, Zhygulin, D.V, Shestovsky, D.V, Yankovski, Yu.N, Brinkevich, D.I

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