La Doped HZO-Based 3D-Trench Metal-Ferroelectric-Metal Capacitors With High-Endurance (>10¹²) for FeRAM Applications von Walke, Amey M., Popovici, Mihaela I., Sharifi, Shamin H., Demir, Eyup C., Puliyalil, Harinarayanan, Bizindavyi, Jasper, Yasin, Farrukh, Clima, Sergiu, Fantini, Andrea, Belmonte, Attilio, Kar, Gouri S., Houdt, Jan V.

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10¹²) for FeRAM Applications von Walke, Amey M, Popovici, Mihaela I, Sharifi, Shamin H, Demir, Eyup C, Harinarayanan Puliyalil, Bizindavyi, Jasper, Yasin, Farrukh, Clima, Sergiu, Fantini, Andrea, Belmonte, Attilio, Kar, Gouri S, Houdt, Jan V

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